Abstract-Multicomponent hard coatings based on nitrides of Si doped transition metals have been pro duced by vacuum-arc deposition with the use of a RF generator and separation of an ion-plasma flux. Physico mechanical and tribotechnical characteristics of coatings have been studied. The possibility of their use as efficient protective coatings has been shown. DOI: 10.3103/S1063457614010055Keywords: protective coatings, vacuum-arc deposition, nitrides of metals, cutting tools. INTRODUCTIONOne of the priority directions of the modern science and technology is the development of new materials on the basis of multicomponent alloys, nanocomposite coatings, and analysis of their physico mechanical and tribological characteristics [1,2].To produce multicomponent and multilayer coatings, the ion-plasma deposition methods are most used in the industry, in particular, magnetron sputtering [3] and vacuum arc deposition [4]. The use of ion-plasma methods makes it possible to produce multicomponent coatings of different materials by mixing plasma streams from several sources or by sputtering of a cathode, which contains various components in its compo sition. Of greatest scientific interest are the methods, the use of which makes possible the formation of multi component coatings by conventional devices with one cathode containing necessary components in required ratios. The advances of technologies of applying nanocomposite coatings by ion-plasma methods require a further improvement of the known sputtering systems and development of fundamentally new devices [5,6]. Synthesized multicomponent coatings have high operational characteristics due to the stabilities of the struc ture and composition, which are characterized by the minimum Gibbs energy.Of refractory compounds that demonstrate high functional characteristics nanocrystalline composites pro duced as interstitial solid solutions based on nitrides of titanium, zirconium, hafnium, silicon, etc. take up a special place [7,8].The aim of the present study was to develop superhard multicomponent nitride systems based on solid solu tions produced by sputtering all metal cathodes using a vacuum-arc deposition from a separated beam and RF low energy ion treatment and to study physico mechanical properties of the resulting coatings. The use of separated ion-plasma flux will make it possible to practically get rid of a drop fraction in the coatings formed.

The effect of cutting ShKh15 hardened steel on the element and phase composition of the surface layer of the coating deposited on the cBN-based tool is studied. The microstructure and oxidation kinetics of the surface layer of the AlN-Ti(Cr)B 2 magnetron coating are investigated during both formation and turning. The coating is formed by HF magnetron sputtering of an AlN-Ti(Cr)B 2 target. The formation of a two-layer tribofilm with a nanosize outer layer is examined. The phase composition of the tribofilm is determined using layer-by-layer Auger analysis. Its outer nanosize layer is a glass-like phase in the form of limited solid solutions based on Al 2 O 3 oxides and playing a role of solid lubricant. As the cutting speed is increased, the wear rate for the coated tool decreases compared with the uncoated tool.