2015
DOI: 10.1016/j.tsf.2015.02.068
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Superhard TiAlCN coatings prepared by radio frequency magnetron sputtering

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Cited by 35 publications
(11 citation statements)
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“…When Al and C are simultaneously added to the TiN system, quaternary coatings show a unique combination of both high thermal stability and outstanding tribological properties [23,24]. The studies described in [23][24][25][26][27][28][29] show that the content of C plays an important role in the determination of the structure and properties of (Ti,Al)CN coatings, since C can exist in various forms. Another important factor is the content of N. The unsaturated and supersaturated contents of N result in the formation of different nitride phases and coating properties [23].…”
Section: Introductionmentioning
confidence: 99%
“…When Al and C are simultaneously added to the TiN system, quaternary coatings show a unique combination of both high thermal stability and outstanding tribological properties [23,24]. The studies described in [23][24][25][26][27][28][29] show that the content of C plays an important role in the determination of the structure and properties of (Ti,Al)CN coatings, since C can exist in various forms. Another important factor is the content of N. The unsaturated and supersaturated contents of N result in the formation of different nitride phases and coating properties [23].…”
Section: Introductionmentioning
confidence: 99%
“…The mechanical behaviour of the coatings was characterized by the ratios H/E r and H/E r 2 and the elastic recovery ER (%) [19]. The H/E r ratio indicates the amount of strain a coating can stand before a permanent deformation happens, so a higher H/E r ratio indicates a better wear resistance [74 78].…”
Section: Elemental and Phase Compositionsmentioning
confidence: 99%
“…In all of the examples presented above, the C or N contents within the coatings were tuned in order to get improved characteristics targeted at specific applications. Carbonitride coatings, MeCN, where Me can be either Ni, Cr, Fe, Al, Hf, Ti, Zr, Si, or a combination of these have been used for dies and cutting tools due to their good resistance to oxidation and to thermal cycling [7,19], wear resistant [25 28] , microelectronics [29] , responsive sensors [30], hot work tool steels [31], diffusion barrier coatings [25,26,32], coatings with high toughness [4], anticorrosive coatings [33 36]. Due to their high hardness and low friction coefficient, TiCN coatings deposited on a broad range of substrates are widely used in many industries, aiming for a variety of applications accepting low service temperatures (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…In the last decade, numerous papers have been devoted to the MeSiC, MeSiN, and MeSiCN hard coatings, where Me is a transition metal and Si is an alloying element. These coatings were found to have superior mechanical properties (high hardness and strength), thermal stability, reduced friction, and enhanced wear-corrosion resistance [69,70]. In particular, investigations on TiSi-based carbide or carbonitride coatings as a possible candidate for a variety of metallic implants have attached interest because they can combine the mechanical, anticorrosive, and tribological properties of the TiC or TiCN with the biological characteristics of the SiC or SiCN [71,72].…”
Section: Bioinert Coatingsmentioning
confidence: 99%