2002
DOI: 10.1063/1.1503857
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Suppression of interdiffusion in GaAs/AlGaAs quantum-well structure capped with dielectric films by deposition of gallium oxide

Abstract: In this work, different dielectric caps were deposited on the GaAs/AlGaAs quantum well ͑QW͒ structures followed by rapid thermal annealing to generate different degrees of interdiffusion. Deposition of a layer of Ga x O y on top of these dielectric caps resulted in significant suppression of interdiffusion. In these samples, it was found that although the deposition of Ga x O y and subsequent annealing caused additional injection of Ga into the SiO 2 layer, Ga atoms were still able to outdiffuse from the GaAs … Show more

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Cited by 36 publications
(11 citation statements)
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“…This model was proposed by Mark and Helfrich 11 and has been widely used to explain the J-V characteristics of inorganic amorphous dielectrics and organic semiconductor materials. [12][13][14] We analyzed the J-V characteristics of the PTVTF polymeric layer using the SCLC theory assuming an exponential trap distribution. The result was quite reasonable compared to that obtained by time of flight ͑ToF͒ analysis.…”
Section: Origin Of High Mobility Within An Amorphous Polymeric Semicomentioning
confidence: 99%
“…This model was proposed by Mark and Helfrich 11 and has been widely used to explain the J-V characteristics of inorganic amorphous dielectrics and organic semiconductor materials. [12][13][14] We analyzed the J-V characteristics of the PTVTF polymeric layer using the SCLC theory assuming an exponential trap distribution. The result was quite reasonable compared to that obtained by time of flight ͑ToF͒ analysis.…”
Section: Origin Of High Mobility Within An Amorphous Polymeric Semicomentioning
confidence: 99%
“…5 If the strain created is large enough it will also penetrate into the underlying layers. A compressively strained interface enhances the movement of the Ga vacancies created at the capping layer/GaAs interface during annealing, whereas tensile strain will trap these vacancies at the interface creating large defect clusters.…”
Section: Introductionmentioning
confidence: 99%
“…27 On the other hand, SrTiO 3 may also cause reduction of Ga vacancies generation possibly due to various factors during annealing such as layer quality, diffusion of inherent defects, and the metallurgical reaction between GaAs and SrTiO 3 films. 32 Note that, at 725°C, a PL blue shift accompanied by a broad emission with peak at ES rather than GS (shoulder at longer wavelength region) is observed, indicating that the limit for intermixing inhibition is up to 700°C. We postulate that the emission peaks observed at 1125 and 1050 nm is from the GS and ES of highly interdiffused QDs with small sizes, and the long wavelength shoulder to the GS emission of least interdiffused QDs with larger size where the interdiffusion is minimal.…”
Section: Plasma-enhanced Chemical Vapor Depositionmentioning
confidence: 99%