Surface acoustic wave gas sensor based on film conductivity changes

Ricco, Antonio J.; Martin, Stephen J.; Zipperian, T. E.

doi:10.1016/0250-6874(85)80031-7

Cited by 248 publications

(129 citation statements)

References 17 publications

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“….Gas sensing properties and sensing mechanisms The relationship between the frequency shift (Δf) and the electric loading is given below [27],…”

Section: Characterization Of Prepared Filmsmentioning

confidence: 99%

“…The core part of such a sensor is a SAW resonator coated with a sensitive film layer to act as frequency-changing component through the adsorption/chemical binding of ammonia molecules. The central frequency of the resonator can alter the conductivity (electric loading), effective mass (mass loading) or elastic modulus/density/viscosity (elastic loading) of the film [26][27][28][29]. Hence, for a good SAW based NH3 sensor, the sensitive film should be sensitive to one or all these variations when exposed to NH3 gas.…”

Section: Introductionmentioning

confidence: 99%

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NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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Northumbria University has developed Northumbria Research Link (NRL) to enable users to access the University's research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: http://nrl.northumbria.ac.uk/policies.html This document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher's website (a subscription may be required.) This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. and SiO2-TiO2 films showed positive frequency shifts, whereas SiO2 film exhibits a negative frequency shift to NH3 gas. it is believed that the negative frequency shift was mainly caused by the increase of NH3 mass loading on the sensitive film while the positive frequency shift was associated to the condensation of the hydroxyl groups (-OH) on the film making the film stiffer and lighter, when exposed to NH3 gas. It demonstrated that humidity played a significant factor on the sensing performance. Comparative studies exhibited that the sensor based on the composite SiO2-TiO2 film had a much better sensitivity to NH3 at a low concentration level (1 ppm) with a response of 2 KHz, and also showed fast response and recovery, excellent selectivity, stability and reproducibility. Accepted Manuscript

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“….Gas sensing properties and sensing mechanisms The relationship between the frequency shift (Δf) and the electric loading is given below [27],…”

Section: Characterization Of Prepared Filmsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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“…For the last few decades, surface acoustic wave devices have been used not only for wireless communication systems [1], but also for gas [2][3][4], temperature and pressure sensors [5][6][7] due to their intrinsic energy confinement in a narrow region underneath the surface. Furthermore, the interest in tyre pressure monitoring systems (TPMS) for the automotive industry has increased in recent years.…”

Section: Introductionmentioning

confidence: 99%

High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid

Iriarte

Williams

et al. 2013

Sensors and Actuators A: Physical

100

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In this paper, an AIN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AIN quality and hence the device response. In order to study the feasibility of this structure, AIN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AIN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10-14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

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“…the difference between the two oscillator frequencies f and f 0 -see Figure 2b. Such an experimental set-up for the SAW sensor is based on currently well known techniques (5)(6)(7)(8). …”

Section: Introductionmentioning

confidence: 99%

Acoustoelectric Effect in Hydrogen Surface Acoustic Wave Sensors with Phthalocyanine-Palladium Sensing Bi-layers

et al. 2006

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Bi-layer structures with two thicknesses of metal-free phthalocyanine (~80 and ~120 nm) but the same thickness of palladium (~20 nm), have been studied for hydrogen and carbon monoxide gas-sensing applications at ~30 °C and ~50 °C temperatures. The structures were fabricated in two different vacuum deposition processes (first the H 2 Pc film and followed by the Pd) onto a LiNbO 3 Y-cut Z-propagating substrate for a SAW method. Additionally, using the same deposition techniques, the bilayer structure was deposited onto a glass substrate with a planar microelectrode array for simultaneously monitoring of the planar resistance of the structure. A good correlation has been observed between these two methods; frequency changes for SAW method correlate with decreases of the bilayer structure resistance. These measurements can give information about the acousto-electric interactions between SAW and charge carriers in the bi-layer structure.

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Surface acoustic wave gas sensor based on film conductivity changes

Cited by 248 publications

References 17 publications

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

High precision pressure sensors based on SAW devices in the GHz range

Acoustoelectric Effect in Hydrogen Surface Acoustic Wave Sensors with Phthalocyanine-Palladium Sensing Bi-layers

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