Surface-acoustic-wave pressure and temperature sensors

Reeder, T.M.; Cullen, Donald E.

doi:10.1109/proc.1976.10205

Cited by 58 publications

(14 citation statements)

References 6 publications

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“…Due to the continuous progress of micromachining technology in last decades, micro-electromechanical system (MEMS) sensors started playing a major role in pressure measurement [9]. Nowadays there are many types of pressure sensing technologies for different applications, such as capacitive pressure sensors that utilize a diaphragm and a pressure cavity to create a variable capacitance [10–13]; piezoelectric pressure sensors that utilize the piezoelectric effect in some materials to measure the strain caused by pressure [14–18]; surface acoustic wave (SAW) pressure sensors that utilize the phase velocity variation of surface acoustic wave on piezoelectric substrate when pressure is applied [19–23]; optical pressure sensors in which the characteristics of optical signal such as intensity, polarization, phase or spectrum are modulated by the pressure stimulus [24–29]; and the most commonly used piezoresistive pressure sensors, for which the resistance of the piezoresistive material can be altered by the pressure applied on it [30–34]. …”

Section: Introductionmentioning

confidence: 99%

A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics

Yang

2013

Sensors

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Pressure measurement under harsh environments, especially at high temperatures, is of great interest to many industries. The applicability of current pressure sensing technologies in extreme environments is limited by the embedded electronics which cannot survive beyond 300 °C ambient temperature as of today. In this paper, a pressure signal processing and wireless transmission module based on the cutting-edge Silicon Carbide (SiC) devices is designed and developed, for a commercial piezoresistive MEMS pressure sensor from Kulite Semiconductor Products, Inc. Equipped with this advanced high-temperature SiC electronics, not only the sensor head, but the entire pressure sensor suite is capable of operating at 450 °C. The addition of wireless functionality also makes the pressure sensor more flexible in harsh environments by eliminating the costly and fragile cable connections. The proposed approach was verified through prototype fabrication and high temperature bench testing from room temperature up to 450 °C. This novel high-temperature pressure sensing technology can be applied in real-time health monitoring of many systems involving harsh environments, such as military and commercial turbine engines.

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Section: Introductionmentioning

confidence: 99%

A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics

Yang

2013

Sensors

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“…In the second case, the SAW is used as a two-port device, which is electrically loaded by another sensor and, therefore, indirectly affected by the measurand. One-port SAW sensors have been developed to sense physical and chemical quantities such as temperature, 15 pressure, 16 force, 17 chemical liquid, 18 and magnetic field. 19,20 In a one-port magnetic SAW sensor, either the substrate or the interdigital transducers (IDTs) are magnetic field sensitive to affect the propagation velocity or the resonate frequency.…”

mentioning

confidence: 99%

Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder

Salem

Giouroudi

et al. 2012

Journal of Applied Physics

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Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave (SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.

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“…Equation (15), has appropriately accounted for the vanishing of the slope of the deflection curve at Z I = 0, and together with Eq. (14), results in zero lowest order vertical shearing strain. The corresponding stresses are, respectively, given by …”

Section: Flexural Stresses In Thin Platesmentioning

confidence: 98%