Surface acoustic waves on nanocrystalline diamond

Structural and electrical properties of ZnO films on freestanding thick diamond films

“…ZnO has been of great interest [1] for many applications such as photoelectrical devices [2][3][4][5] , low loss optical waveguides [6] , and surface acoustic wave (SAW) devices [7][8][9][10][11][12][13][14] due to its structural, electrical, and optical properties. Recently, much attention has been paid to high quality piezoelectric ZnO films for SAW devices with operation frequencies higher than 1 GHz, whereas even greater frequencies (superior to 2.5 GHz) tend to push the limits of conventional photolithography [8] .…”

“…Recently, much attention has been paid to high quality piezoelectric ZnO films for SAW devices with operation frequencies higher than 1 GHz, whereas even greater frequencies (superior to 2.5 GHz) tend to push the limits of conventional photolithography [8] . The use of ZnO based on diamond as SAW substrates [8][9][10][11][12][13][14] offers an attractive means for relaxation of the lithographic criteria since diamond has the highest stiff coefficient and sound velocity. SAW devices have been reported based on ZnO/ diamond/Si layered structures with a diamond layer of 10-100 μm deposited by chemical vapour deposition (CVD) technique [9][10][11][12][13][14] .…”

Thin nanodiamond membranes and their microstructural, optical and photoelectrical properties

“…Diamond membranes are particularly interesting for high sensitivity flexural plate wave (FPW) sensors [2]. High quality surface acoustic wave (SAW) filters based on aluminum nitride/diamond structure have been demonstrated [3,4]. Sub-micron, ion sensitive field effect transistors (IS-FET) are being developed on the hydrogen terminated nanodiamond surface [5].…”

Acoustic Waves: A Probe for the Elastic Properties of Films

“…Such devices emit and receive waves at the wavelength which resonates with the periodicity of the transducer, typically at micrometric scale. This configuration was exploited to measure the material properties (Bi et al 2002;Kim et al, 2000), but it is seldom adopted, because it requires the production of a dedicated micro device. Micrometric and sub-micrometric wavelengths correspond to frequencies in the GHz to tens of GHz range.…”