The injection of water vapor into ambient “open air” plasmas for the treatment of polymers represents a promising functionalization route for industrial and medical applications. The present study reports a scientist‐independent methodology, based on the ToF‐SIMS (time‐of‐flight secondary ion mass spectrometry) technique coupled with PCA/Wavelet‐PCA (principal component analysis), to probe the (sub) surface chemical/structural modifications induced by an atmospheric Ar‐D2O post‐discharge on low density polyethylene (LDPE) films as a function of two external plasma parameters, namely sample‐torch distance and treatment time. The SIMS characterization identifies two different families of samples (type I and II) as a function of time and distance. The highest reactivity of the D2O vapors with the LDPE films is achieved for times of few tens of seconds at a distance of 5 mm from the plasma source.