Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Dillon, Anne C.; Ott, Andrew W.; Way, J. Douglas; George, Steven M.

doi:10.1016/0039-6028(95)90033-0

Cited by 447 publications

(479 citation statements)

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“…9,10 For the H 2 O-based process, the decrease in growth per cycle with increasing temperature has been related to the thermal stability of the -OH surface groups which are involved in the Al͑CH 3 ͒ 3 chemisorption reactions. 5,10 The O 2 plasma-based process shows a similar decrease but for the complete temperature range ͑25-400°C͒. This resemblance might indicate some similarities between the surface groups involved in plasmaassisted and thermal ALD of Al 2 O 3 .…”

mentioning

confidence: 76%

“…The conventional, thermal ALD process of Al 2 O 3 using Al͑CH 3 ͒ 3 precursor and H 2 O was found to be ruled by the formation of -CH 3 and -OH surface groups after the precursor and oxidant half-cycles, respectively, with the formation of volatile CH 4 in both half-reactions. [4][5][6] In the O 3 -based ALD process, the formation of -CH 3 surface groups, and volatile CH 4 after Al͑CH 3 ͒ 3 adsorption were found to be similar to the H 2 O-based process. During the O 3 half-cycle, however, the formation of CH 4 and C 2 H 4 have been reported 1,2 and it is still debated whether -OH or formate ͓-O͑-O͒CH͔ groups are the dominant surface species produced by the O 3 reactions.…”

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confidence: 84%

“…After the Al͑CH 3 ͒ 3 precursor adsorption, -CH 3 surface groups appear as observed in stretching ͑asymmetric ϳ2937 cm −1 , symmetric ϳ2896 cm −1 , and bending overtone ϳ2831 cm −1 ͒, deformation ͑ϳ1208 cm −1 ͒, and rocking ͑ϳ750 cm −1 ͒ modes, while -OH surface groups disappear as observed in the broad stretching ͑3750-2770 cm −1 ͒ mode. 4,5,15 This broad -OH stretching feature originates from various types of -OH groups on the Al 2 O 3 surface, ranging from unassociated -OH ͑3800-3700 cm −1 ͒ to associated -OH ͑3700-2700 cm −1 ͒ modes. 5,[16][17][18] For both ALD processes, the differential spectra clearly show that -OH surface groups are created after the reaction of the O 2 plasma and the H 2 O oxidant with the -CH 3 surface groups.…”

mentioning

confidence: 99%

“…4,5,15 This broad -OH stretching feature originates from various types of -OH groups on the Al 2 O 3 surface, ranging from unassociated -OH ͑3800-3700 cm −1 ͒ to associated -OH ͑3700-2700 cm −1 ͒ modes. 5,[16][17][18] For both ALD processes, the differential spectra clearly show that -OH surface groups are created after the reaction of the O 2 plasma and the H 2 O oxidant with the -CH 3 surface groups.…”

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confidence: 99%

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Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

Langereis

Keijmel

Sanden

et al. 2008

Applied Physics Letters

125

134

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The surface groups created during plasma-assisted atomic layer deposition (ALD) of Al2O3 were studied by infrared spectroscopy. For temperatures in the range of 25–150°C, –CH3 and –OH were unveiled as dominant surface groups after the Al(CH3)3 precursor and O2 plasma half-cycles, respectively. At lower temperatures more –OH and C-related impurities were found to be incorporated in the Al2O3 film, but the impurity level could be reduced by prolonging the plasma exposure. The results demonstrate that –OH surface groups rule the surface chemistry of the Al2O3 process and likely that of plasma-assisted ALD of metal oxides from organometallic precursors in general.

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confidence: 76%

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confidence: 84%

mentioning

confidence: 99%

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confidence: 99%

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Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

Langereis

Keijmel

Sanden

et al. 2008

Applied Physics Letters

125

134

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“…The most widely used ALD coating material is aluminum oxide, which uses trimethylaluminum and water as the precursors. 30 For example, conformal and nanometric aluminum oxide coatings on nanosized lithium cobalt oxide ion /el ec tro n Co nd uc tin g Co mp on en t…”

Section: Ultrathin Conformal Coatingmentioning

confidence: 99%

Novel Surface Coating Strategies for Better Battery Materials

Lei

Wang

Liu

et al. 2017

Surface Innovations

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With the advancement of electrode materials for lithium-ion batteries (LIBs), it has been recognized that their surface/interface structures are essential to their electrochemical performance. Therefore, the engineering of their surface by various coating technologies is the most straightforward and effective strategy to obtain the desirable battery characteristics. Coating the electrode materials' surface to form a specifically designed structure/composition can effectively improve the stability of the electrode/electrolyte interface, suppress structural transformation, improve the conductivity of the active materials and consequently lead to enhanced cycle stability and rate capability of LIBs. However, due to the restrictions of conventional coating methods, it is still very hard to obtain a conformal and multifunctional coating layer. This paper focuses on recent advances and summarizes the challenges in the development of surface coating technologies for LIBs. Based on these factors, the new concepts of 'ultrathin conformal coating', 'continuous phase coating' and 'multifunctional coating' are proposed and discussed, followed by the authors' rational perspectives on the future development and potential research hot spot in the surface/ interface engineering of LIB materials and systems.

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Novel Processing to Produce Polymer/Ceramic Nanocomposites by Atomic Layer Deposition

Liu¹

2009

Progress in Nanotechnology

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An innovative process to uniformly incorporate dispersed nanoscale ceramic inclusions within a polymer matrix was demonstrated. Micron-sized high density polyethylene particles were coated with ultrathin alumina films by atomic layer deposition in a fluidized bed reactor at 771C. The deposition of alumina on the polymer particle surface was confirmed by Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. Conformal coatings of alumina were confirmed by transmission electron microscopy and focused ion beam cross-sectional scanning electron microscopy. The results of inductively coupled plasma atomic emission spectroscopy suggested that there was a nucleation period. The results of scanning electron microscopy, particle size distribution, and surface area of the uncoated and nanocoated particles showed that there was no aggregation of particles during the coating process. The coated polymer particles were extruded by a heated extruder at controlled temperatures. The successful dispersion of the crushed alumina shells in the polymer matrix following extrusion was confirmed using cross-sectional transmission electron microscopy. The dispersion of alumina flakes can be controlled by varying the polymer particle size.

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Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Cited by 447 publications

References 48 publications

Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

Novel Surface Coating Strategies for Better Battery Materials

Novel Processing to Produce Polymer/Ceramic Nanocomposites by Atomic Layer Deposition

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