Surface defects in GaAs wafer processes

Matsushita, Hideyoshi; Ishida, Mitsuo; Kikawa, Junjiroh

doi:10.1016/0022-0248(90)90225-a

Cited by 5 publications

(1 citation statement)

References 2 publications

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“…They also found that the orange peel is concentrated on large spatial resolution 350 μm and low amplitude peak-valley height (60 nm peak to valley value). The irregular surface texture, "orange peel" is related to the chemistry and mechanics of the polishing process [12]. These results confirm the relevancy of the multi-scale analysis.…”

Section: Conventional Calculationsupporting

confidence: 74%

A multi-scale approach of roughness measurements: Evaluation of the relevant scale

Gorp¹,

Bigerelle²,

Grellier³

et al. 2007

Materials Science and Engineering: C

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractThis paper proposes a new multi-scale measurement approach performed to compare the surface roughness and the visual aspect of polished surfaces. In this investigation, five specimens of glass moulds presenting different visual aspects are considered. All roughness profiles assessed by tactile profilometry were rectified by a first degree polynomial fitting, and current roughness parameters were calculated with respect to the evaluation length among which they are estimated. A variance analysis was then performed to discriminate each roughness parameter and each evaluation length with regard to a correlation with the visual aspect. Although the average roughness amplitude is about 100 nm, the results show that the optimal correlation with the visual aspect is obtained for a 400 μm evaluation length. Moreover, the multi-scale method allows to confirm results already found in the bibliography about the high wavelengths origin of "orange peel" aspect. This application allowed us to conclude on the advantages and the limits of the implemented method.

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Section: Conventional Calculationsupporting

confidence: 74%