Surface Emitting, Tunable, Mid-Infrared Laser with High Output Power and Stable Output Beam

Abstract

A reflective outcoupler is demonstrated which can allow for stable surface emission from a quantum cascade laser and has potential for cost-effective wafer-scale manufacturing. This outcoupler is integrated with an amplified, electrically tunable laser architecture to demonstrate high power surface emission at a wavelength near 4.9 μm. Single mode peak power up to 6.7 W is demonstrated with >6 W available over a 90 cm−1 (215 nm) spectral range. A high quality output beam is realized with a simple, single-layer, anti-reflective coating. The beam shape and profile are shown to be independent of wavelength.

Research Progress of Horizontal Cavity Surface-Emitting Laser

“…In 2019, Northwestern University [38] developed a reflective outcoupler that generates reflective outcoupling in a semiconductor waveguide using mask shape transfer to form the device's mirrors. The system generates up to 6.7 W of single-mode peak power in the 90 cm −1 (215 nm) spectral range, exceeding 6 W of power.…”

Design Considerations for Discrete Frequency Infrared Microscopy Systems

“…[155][156][157] Semiconductor laser sources such as vertical cavity surface-emitting lasers (VCSELs), which are coherent sources with high S/N, offer unprecedented advantages of low power consumption, narrow linewidth, single-fundamental-mode, and high wavelength tunability. 158 Initially limited to near-IR wavelengths, recent studies have extended spectral emissions to longer wavelengths, up to over 5 mm, with a high beam quality and a significantly higher power output up to 6.7 W. 159 However, commercial-grade VCSELs are not yet available in the mid-IR wavelength range, but the increasing need for compact, portable, and affordable gas sensors is spurring demand for energyefficient semiconductor sources of mid-IR light. 160 Invention of VCSELs in the mid-IR range with continuous and pulsed mode operation is a significant step with the possibility of covering the molecular fingerprint region.…”

Electro‐Optical Performance of Surface‐Emitting Micromirror Superluminescent Diodes

“…This approach is used to enhance the performance of light emitting diodes (LEDs) [12] and has been recently reported to deliver high power outputs in mid-IR lasers. [13] We report on the performance of novel surface-emitting SLEDs, where integrated tilted micromirrors deflect in-plane-guided ASE modes perpendicular to the ARC-coated chip surface. Total internal reflection (TIR) at the micromirrors deflects modes out of the waveguide, resulting in emission from both ends.…”