2007
DOI: 10.1063/1.2793820
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Surface encapsulation for low-loss silicon photonics

Abstract: Encapsulation layers are explored for passivating the surfaces of silicon to reduce optical absorption in the 1500-nm wavelength band. Surface-sensitive test structures consisting of microdisk resonators are fabricated for this purpose. Based on previous work in silicon photovoltaics, coatings of SiNx and SiO2 are applied under varying deposition and annealing conditions. A short dry thermal oxidation followed by a long high-temperature N2 anneal is found to be most effective at long-term encapsulation and red… Show more

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Cited by 24 publications
(26 citation statements)
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“…In the context of optomechanics, for metrological and quantum applications, the impact of these microscopic aspects on mechanical dissipation [39,40] will also be of utmost importance. Nanoscale GaAs resonators, just like those made out of other materials including silicon [3,41,42], will require advanced surface physics and engineering to reveal their scientific potential in full.…”
Section: 000218mentioning
confidence: 99%
“…In the context of optomechanics, for metrological and quantum applications, the impact of these microscopic aspects on mechanical dissipation [39,40] will also be of utmost importance. Nanoscale GaAs resonators, just like those made out of other materials including silicon [3,41,42], will require advanced surface physics and engineering to reveal their scientific potential in full.…”
Section: 000218mentioning
confidence: 99%
“…The source of optical absorption in our structures is most likely due to electronic defect states at the surface of Si [26,27]. This heating mechanism is investigated at T f = 10 mK, for which n f is negligible, by measuring n and γ using an optically resonant probe ( = 0; γ OM = 0).…”
mentioning
confidence: 99%
“…However, in sub-micrometer-sized silicon waveguides and microresonators, the optical mode fields can have a substantial spatial overlap with the silicon surfaces, which have surface states due to either dangling bonds or the breaking of the crystal symmetry. Such surface states can introduce energy levels within the bandgap, and thus enable linear absorption for sub-bandgap wavelengths [15,35]. The absorbed photons can heat up the silicon photonic structures, resulting in thermo-optical dispersion.…”
Section: Linear-absorption-induced Thermo-optical Dispersionmentioning
confidence: 99%