Surface machining characteristics of sapphire with fifth harmonic YAG laser pulses

Thrust Performance Test of a Micro Multi-Plasmajet-Array Thruster

“…In contrast, it has been reported that utilization of short-pulse lasers can be effective in rapid micromachining of these materials 20) . For this reason, we have developed and been using a laser micromachining system shown in Fig.1 for machining of micro-nozzles [13][14][15]20) .…”

“…For this reason, we have developed and been using a laser micromachining system shown in Fig.1 for machining of micro-nozzles [13][14][15]20) . In order to minimize and localize thermal influences such as formation of molten layers and cracks, and to achieve accurate geometries, a short-pulse ultra-violet laser system was utilized.…”

Effects of Nozzle Geometries on Thrust Performance Improvement of Micro-Multi-Nozzle-Array Thrusters

“…In contrast, it has been reported that utilization of short-pulse lasers can be effective in rapid micromachining of these materials 16) . For this reason, we have developed and been using a laser micromachining system shown in Fig.2 for machining of micro-nozzles [13][14][15][16] .…”

“…In this investigation, geometrical accuracy and thermal influences such as degrees of molten layer thickness and crack formation, not preferred for higher accuracy and quality of surfaces, were evaluated. 16) From these results, it was suggested that shorter wavelength lasers are capable for accurate control of the removing depth and also for reduction and localization of thermal influences. Microscopic photographs of examples of various rectangular micro-nozzles are shown in Fig.4.…”

“…For this reason, we have developed and been using a laser micromachining system shown in Fig.2 for machining of micro-nozzles [13][14][15][16] . In order to minimize and localize thermal influences such as formation of molten layers and cracks, and to achieve accurate geometries, a short-pulse ultra-violet laser system was utilized.…”