Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry

Cell adhesion and growth on surfaces modified by plasma and ion implantation

“…For the DLC-O, the contact angle obtained was (63 6 2) (SFE ¼ 39 6 1 mN/m) and, for the DLC-F, was (90 6 1) (SFE ¼ 27 6 2 mN/m), which is compatible with the literature results. [42][43][44] These results agree with those previously reported by Duailibi et al, 45 showing that hydrophilic surfaces benefit cell growth. Concerning to the DLC without plasma treatment, cell growth presented different behaviors for each of the three independent experiments.…”

Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy

“…The PECVD stainless-steel chamber used in this study was equipped with a plasma source and an MIR-IRAS monitoring system. 11,[25][26][27][28] The chamber was evacuated using a highvacuum pump to maintain a base pressure of less than 5 © 10 ¹6 Torr. Benzene was placed in a glass cylinder to which a valve (ANELVA Variable Leak Valve) was attached.…”

“…We conducted infrared absorption spectroscopy (IRAS) in the multiple internal reflection (MIR) geometry (MIR-IRAS) to monitor the film deposition during benzene-PECVD. This method can be applied to in situ and real-time monitoring of plasma processes, [11][12][13][22][23][24][25][26][27][28] as it is applicable to a wide variety of environmental situations. We monitored the evolution of various hydride components to elucidate the deposition on the atomic scale.…”

“…For instance, the presence of water molecules in the source and vacuum chamber will disrupt the monitoring, as O-H peaks can overlap with the C-H peaks, but the C-D peaks are located at wavelengths different from those of the O-H peaks; the O-H stretching vibration region is at 3000-3600 cm ¹1 and the C-H stretching region is at 2800-3200 cm ¹1 , whereas the C-D stretching region is at 2000-2400 cm ¹1 . [26][27][28][30][31][32][33][34][35] Furthermore, the penetration depth increases proportion all to the wavelength of IR light; for an incident IR light of ³3000 cm ¹1 , i.e., in the C-H vibration region, the penetration depth is approximately 280 nm [22][23][24] (assuming refractive indices of 1.6 and 3.4 for amorphous carbon and Si, respectively 36,37) ). For incident IR light of ³2500 cm ¹1 , near the C-D region, the penetration depth is ³340 nm.…”

Reactions of surface hydrogen on amorphous carbon films with hydrogen plasma

“…Therefore, we investigated the reaction of hydrogen plasma with an amorphous carbon film at a high substrate temperature of 200 °C by infrared (IR) absorption spectroscopy in multiple internal reflection (MIR) geometry (denoted as MIR-IRAS). [21][22][23][24][25][26][27][28][29][30] The method, which has a detection sensitivity on the atomic scale, 28,29) can be applied to the in situ and real-time measurements of surface reactions during plasma exposure, 21,22,[24][25][26] because IR cannot interact with plasma.…”