2013
DOI: 10.1155/2013/560542
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Surface Modification on the Sputtering‐Deposited ZnO Layer for ZnO‐Based Schottky Diode

Abstract: We prepare a zinc oxide- (ZnO-) based Schottky diode constructed from the transparent cosputtered indium tin oxide- (ITO-) ZnO ohmic contact electrode and Ni/Au Schottky metal. After optimizing the ohmic contact property and removing the ion-bombardment damages using dilute HCl etching solution, the dilute hydrogen peroxide (H2O2) and ammonium sulfide (NH4)2Sxsolutions, respectively, are employed to modify the undoped ZnO layer surface. Both of the Schottky barrier heights with the ZnO layer surface treated by… Show more

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Cited by 11 publications
(3 citation statements)
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“…Deionized (DI) water droplets (5 µL) were placed onto the ZnO NR surfaces. As shown in Supplementary Table S4 [48][49][50][51][52][53][54][55] , EWOD devices actually can use any aqueous (polar) liquids, including most water-based biofluids and chemical solutions 56 . However, aqueous solutions, in general, are tested in EWOD studies, because they are often required for some EW applications, such as lab-on-chip (chemical properties) and liquid lenses (optical properties) 51 .…”
Section: Deposition Ofmentioning
confidence: 99%
“…Deionized (DI) water droplets (5 µL) were placed onto the ZnO NR surfaces. As shown in Supplementary Table S4 [48][49][50][51][52][53][54][55] , EWOD devices actually can use any aqueous (polar) liquids, including most water-based biofluids and chemical solutions 56 . However, aqueous solutions, in general, are tested in EWOD studies, because they are often required for some EW applications, such as lab-on-chip (chemical properties) and liquid lenses (optical properties) 51 .…”
Section: Deposition Ofmentioning
confidence: 99%
“…A peroxide surface treatment on ZnO surface may transform ZnO hexagonal into ZnO 2 cubic phase [ 27 37 ]. The ZnO 2 phase is found to have superior resistivity; thus, it can be exploited for Schottky contact and photodiodes applications; however, the potential of ZnO 2 for switching memory, especially the switching characteristics modulation by controlling peroxide treatment is still less investigated [ 26 , 29 38 ]. Therefore, a detail investigation on the impact of peroxide surface treatment on switching characteristics is necessary for further adoption and realization of ZnO 2 -based switching memory.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, ZnO has advantages of excellent resistance to the radiation damage, suitable for the wet-etching process, and large exciton binding energy of 60 meV at room temperature; some ZnO-based optoelectronic applications are expected to be a good substitute for gallium nitride (GaN), another wide band gap ( E g ~3.4 eV at 300 K) semiconductor that is the current state-of-the-art approach used for the production of green, blue-ultraviolet, and white light-emitting devices. ZnO has much simpler types of crystal-growth methods, such as sputtering, pulse laser deposition, and hydrothermal methods, resulting in cost-effective approaches for the production of ZnO-based devices [ 4 , 5 , 6 ]. Among these deposition methods, sputtering technology is a widely used technology for preparing quality and large-sized ZnO film on substrates at a relatively low temperature.…”
Section: Introductionmentioning
confidence: 99%