Surface-mountable silicon microlens for low-cost laser modules

Uekawa, M.; Sasaki, Hirokazu; Shimura, Daisuke; Kotani, Kazuhiko; Maeno, Y.; Takamori, Takeshi

doi:10.1109/lpt.2003.813396

Cited by 13 publications

(1 citation statement)

References 5 publications

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“…The silicon micromachining technologies that are used in the microelectronics industry are widely applied to tool silicon precision substrates for passive alignment fiber optic subassemblies. The accuracy of silicon substrates is adequate for the passive alignment of single mode photonic devices and components [4], [15], [16]. Another possible technology for producing high-precision structures with high aspect ratios and great structural heights with tight tolerances is lithography, electroplating, and molding (LIGA) [17].…”

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Fiber Pigtailed Multimode Laser Module Based on Passive Device Alignment on an LTCC Substrate

Keränen

Mäkinen

Kautio

et al. 2006

IEEE Trans. Adv. Packag.

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A concept that utilizes structured planar substrates based on low-temperature cofired ceramics (LTCC) as a precision platform for a miniature passive alignment multimode laser module is demonstrated. The three-dimensional shape of the laminated and fired ceramic substrate provides the necessary alignment structures including holes, grooves, and cavities for the laser-to-fiber coupling. The achieved passive alignment accuracy allows high coupling efficiency realizations of multimode fiber pigtailed laser modules. Thick-film printing and via punching can be incorporated in order to integrate electronic assemblies directly on the optomechanical platform. The platform is scalable, and it allows embedding of subsystems, such as silicon optical bench (SiOB), but it also provides the interface for larger optical systems. Temperature management of high-power laser diodes is achieved by realizing heat dissipation structures and a cooling channel into the LTCC substrate. The measured maximum laser metallization temperature was 70 C when a thermal power of 0.5 W was applied at the laser active area using a liquid cooling of 50 mL/min. The measured maximum temperature of the laser surface was about three times higher without liquid cooling. Optical coupling efficiency of the multimode laser systems was simulated using optical systems simulation software. The nominal coupling efficiency between 100 1 m stripe laser and 62.5/125-m graded index fiber (NA = 0.275) was 0.37. The simulated coupling efficiency and alignment tolerances were verified by prototype realization and characterization. The measured alignment tolerance values between laser and fiber in AT prototype series were 1 = 7.7 m, 1 = 7.6 m, and 1 = 10.8 m (SD values). The corresponding values in A2 prototype series were 1 = 3.1 m, 1 = 9.1 m, and 1 = 10.2 m. The measured average coupling efficiency was 0.28 in AT series and 0.31 in A2 series. The coupling efficiencies of all operational prototypes varied from 0.05 to 0.43.

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