2002
DOI: 10.1021/la020420x
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Surface Plasmon Characterization of Positive-Tone Photoimaging in Polymer Langmuir−Blodgett Films

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Cited by 6 publications
(5 citation statements)
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“…8(a), the absorption bands of the p(nPMA-AMMA) LB films decreased and disappeared as deep UV In the IR spectra (Fig. 9), a significant absorbance at about 3400 cm 21 , assigned to an -OH stretching vibration, increased after irradiation at 254 nm (1.56 mW cm 22 ). The anthrylmethyl ester is decomposed by deep UV irradiation; then, the carboxylic group is formed through H-abstraction.…”
Section: Photopatterning Mechanism Of P(npma-amma) Lb Filmsmentioning
confidence: 98%
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“…8(a), the absorption bands of the p(nPMA-AMMA) LB films decreased and disappeared as deep UV In the IR spectra (Fig. 9), a significant absorbance at about 3400 cm 21 , assigned to an -OH stretching vibration, increased after irradiation at 254 nm (1.56 mW cm 22 ). The anthrylmethyl ester is decomposed by deep UV irradiation; then, the carboxylic group is formed through H-abstraction.…”
Section: Photopatterning Mechanism Of P(npma-amma) Lb Filmsmentioning
confidence: 98%
“…The anthrylmethyl ester is decomposed by deep UV irradiation; then, the carboxylic group is formed through H-abstraction. [21][22][23][24][25] This is the reason why the irradiated portion was developed with alkaline aqueous solution.…”
Section: Photopatterning Mechanism Of P(npma-amma) Lb Filmsmentioning
confidence: 99%
“…16,17 We have continued to investigate photolithographic materials with a series of polymer LB films containing N-alkylacrylamine. [18][19][20] For anthracene containing copolymer, we reported the photolithographic properties of poly (N-neopentyl methacrylamine-co-9-anthrylmethyl methacrylamine) LB films, found this ultrathin films could undergo not only photodimerization under irradiation at 365 nm, resulting a fine negative-tone pattern, but photodecomposition at 254 nm, resulting fine positive-tone pattern. It means that both the positive-tone and negative-tone photoresist patterns can be obtained by choosing a suitable irradiation wavelength.…”
mentioning
confidence: 99%
“…In fact, preparation of pDDA monolayers requires no addition of ions to the water subphase to stabilize the monolayer formation. The pDDA monolayers were deposited onto numerous substrates, such as quartz, glass, ITO glass, 10,11 metals, 18,19 plastic fiber, and spin-coated films.…”
mentioning
confidence: 99%