2013
DOI: 10.1063/1.4809521
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Surface plasmon enhanced light emission from AlGaN-based ultraviolet light-emitting diodes grown on Si (111)

Abstract: We report on the development of surface plasmon (SP) enhanced AlGaN-based multiple quantum wells (MQWs) ultraviolet (UV) light-emitting diodes (LEDs) grown on silicon (111) substrates. In order to generate SP-coupling with the radiating dipoles in MQWs, an aluminum layer is selectively deposited in holes etched in the top p-AlGaN to p-GaN layers. After flip-chip bonding and substrate removal, an optical output power of ∼1.2 mW is achieved at an emission wavelength of 346 nm; the output power of these UV LEDs w… Show more

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Cited by 72 publications
(51 citation statements)
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“…[1][2][3] UV-LEDs are targeted for a wide range of potential applications, such as water purification, sterilization, biological detection, medical treatment, and high-density optical recording. [4][5][6] For these devices, hexagonal AlGaN is one of the most suitable materials because its Al content-dependent energy band gap lies within the range of 3.4 -6.2 eV at 300 K. Unfortunately, due to the low surface migration rate of Al atoms and the strong parasitic reaction inside AlGaN epilayers grown by metal organic chemical vapor deposition (MOCVD), adduct compounds are usually generated; these tend to be converted into solid particles of Al and Ga, resulting in poor crystal quality. So far, the crystal quality and optical properties of AlGaN epilayers and their relationship with growth parameters, such as substrate temperature, precursor flow rates, and dopants employed, have been studied by many researchers using photoluminescence (PL) spectroscopy, atomic force microscopy (AFM), and scanning electron microscopy (SEM).…”
Section: Introductionmentioning
confidence: 97%
“…[1][2][3] UV-LEDs are targeted for a wide range of potential applications, such as water purification, sterilization, biological detection, medical treatment, and high-density optical recording. [4][5][6] For these devices, hexagonal AlGaN is one of the most suitable materials because its Al content-dependent energy band gap lies within the range of 3.4 -6.2 eV at 300 K. Unfortunately, due to the low surface migration rate of Al atoms and the strong parasitic reaction inside AlGaN epilayers grown by metal organic chemical vapor deposition (MOCVD), adduct compounds are usually generated; these tend to be converted into solid particles of Al and Ga, resulting in poor crystal quality. So far, the crystal quality and optical properties of AlGaN epilayers and their relationship with growth parameters, such as substrate temperature, precursor flow rates, and dopants employed, have been studied by many researchers using photoluminescence (PL) spectroscopy, atomic force microscopy (AFM), and scanning electron microscopy (SEM).…”
Section: Introductionmentioning
confidence: 97%
“…In previous studies of the localized surface-plasmon-enhanced GaN-based LEDs, a metallic nanoparticle layer was embedded in the n-or p-GaN layer of LEDs [19][20][21][22]. It is believed that the coupling of spontaneous emission from InGaN/GaN multiple quantum wells (MQWs) with the localized surface plasmons (LSPs) of metal/dielectric nanostructures can be enhanced light emission by improving the IQE of the device.…”
Section: Introductionmentioning
confidence: 99%
“…The ultraviolet, blue, and green LEDs with SP-coupling have been reported with the improved internal quantum efficiency. 1,2,[4][5][6][7][8] In these reports, metal nano-structures (NS) are used for the effective SP coupling with nitride-based quantum well (QW) and radiation of the SP polariton (SPP) or localized SP (LSP). Thus, the metal nano-structures 9 are very important to enhance the emission efficiency of SP-coupling LED.…”
Section: Introductionmentioning
confidence: 99%