Abstract:In the present work, the radio frequency (RF) magnetron sputtering process was used to develop boron nitride thin films on 316L stainless steel. The target material used in the experiment was a hexagonal boron nitride (c-BN) target. The deposition was performed in three different Ar and N2 system mixing regimes. The composition and morphology of the coating developed at various N2 and Ar plasma ratios were investigated using scanning electron microscopy (SEM) and X-ray diffraction (XRD) techniques. The electro… Show more
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