Abstract. Magnetic relaxation of FePd alloy epitaxial thin films with very flat surfaces prepared on MgO(001) substrate are measured by in-plane broadband ferromagnetic resonance (FMR). Magnetic relaxation is investigated as for FMR absorption peak by frequency sweep measurements. is calculated by using the measured . Gilbert damping constant, , is estimated by employing a straight line fitting of the resonant frequency dependence of . The value for an FePd film deposited at 200 ˚C, which shows disordered A1 structure, is 0.010 and 0 , which is frequency independent part of , is 10 Oe. The value for a film annealed at 400 ˚C, which shows partially L1 0 ordered structure (S=0.32), is 0.013, which is slightly larger than that for the disorder A1 structure film. However, 0 for the annealed film is 85 Oe, which is much larger than that for the film with disordered structure. The results show that the magnetic relaxation of the 400 ˚C annealed film is mainly dominated by 0 , which is related with magnetic in-homogeneity caused by the appearance of perpendicular anisotropy of partially ordered phase.