2001
DOI: 10.1063/1.1398067
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Surface smoothing by energetic cluster impact

Abstract: This article reports on experimental observations of surface smoothing by high energy cluster impact. Thin films have been produced by energetic cluster impact deposition (ECI), and the surface roughness and the power spectrum of the films have been measured by atomic force microscopy. By depositing large metal clusters onto an initially rough substrate, the surface roughness is significantly reduced. On the other hand, the roughness of initially smooth surfaces increases only logarithmically. Results for both… Show more

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Cited by 39 publications
(14 citation statements)
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“…The depositions were made in a few minutes, such that the density of the nanoparticles deposited on the substrates was not too high. In order to retain the structural and morphological properties, the energy of cluster impact 20,21 was controlled; the energy of acceleration was kept at 0.1 eV atom À1 , assuring a soft landing of the particles on the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…The depositions were made in a few minutes, such that the density of the nanoparticles deposited on the substrates was not too high. In order to retain the structural and morphological properties, the energy of cluster impact 20,21 was controlled; the energy of acceleration was kept at 0.1 eV atom À1 , assuring a soft landing of the particles on the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…7,8 In this technique, charged gold clusters are accelerated by an electric field onto the clean silicon substrate. The gold clusters are produced by a magnetron sputter discharge within a gas aggregation source.…”
Section: A Film Fabrication and Characterizationmentioning
confidence: 99%
“…To keep a low density of nanoparticles, the depositions were made in just a few minutes. In order to preserve the structural and morphological properties, the energy of cluster impact 22,23 was controlled; the energy of acceleration was close to 0.1 eV/atom, which corresponds to a soft landing regime. 22,24 The morphological characterization of the particles was made by AFM analysis, using a Veeco CPII AFM system in contact mode.…”
Section: Experimental Methods and Theoretical Calculationsmentioning
confidence: 99%