Alternating current and step pulse field effect on n‐type GaAs with real surfaces of natural oxides are investigated as a function of temperature, electric field strength, frequency, and surface potential. The sign of the field induced changes of surface conductivity implies depletion layers in the surface. The kinetics of the field effect measurements show complex behaviours including a field induced hysteresis, a frequency dispersion, and a temperature dependence of the field effect curves. The interface state density at the GaAs–oxide interface is derived from the combination with thermally stimulated current measurements of the field induced conductivity changes. The density of interface states per energy interval consists of a continuous distribution with a minimum in the upper half of the energy gap.