Surface Studies for Quartz Resonators

Vig, J.R.; Cook, Charles F.; Schwidtal, K.; Lebus, J.W.; Hafner, E.

doi:10.1109/freq.1974.200008

Cited by 23 publications

(3 citation statements)

References 12 publications

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“…Lapping was carried out on a cast iron pad with 15 μm and 3 μm (in this sequence) alumina (Al 2 O 3 ) grits, whereas polishing was carried out on an expanded polyurethane pad with 0.05 μm alumina grits. Alumina with these grit sizes is currently adopted for the manufacturing process of high‐Q resonators (Brice, 1985; Vig et al, 1974). In both cases, the sliding velocity and the concentration of the slurry (in distilled water) were 75 mm/s and 85 g/L, respectively.…”

Section: Methodsmentioning

confidence: 99%

“…In practical applications, quartz thin plates with different size, shape and crystallographic orientation are carefully prepared to manufacture piezoelectric devices with a wide variety of frequencies. The frequency accuracy depends, among other things, on plate topographic characteristics such as roughness, cleanness, and the level of strained surface layer (Vig et al, 1974). Since lapping and polishing are expensive operations, the possibility to predict or simulate the topographic characteristics of quartz plate surfaces as a function of operating parameters such as contact forces, sliding velocities and abrasive grits would be highly desirable (Sekiguchi & Funakubo, 1980).…”

Section: Introductionmentioning

confidence: 99%

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Morphologic characterization and fractal analysis of lapped and polished surfaces of quartz single crystals

Ţălu

Guzzo

Salerno

et al. 2021

Microscopy Res & Technique

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Lapping and polishing are industrial processes sometimes used alternatively for surface finishing of hard and brittle materials. This article presents advanced image analysis of surfaces of quartz crystal blanks finished by lapping and polishing. Scanning electron micrographs were obtained from workpiece surfaces parallel to Y‐, AT‐, and Z‐cut crystal planes treated with different normal stress and abrasive grit size, and stereometric and fractal/multifractal approaches were used to analyze the respective surfaces. Fractal dimensions and segmentation parameters were able to decode the effect of normal stress increasing on the surface roughness of lapped and polished samples. Moreover, the texture isotropy and the bifractal—hence agglomerated—nature of the surface patterns, suggest that both treatments dismiss the anisotropic signature of hardness and fracture toughness inherent to each crystal plane. This study provides promising results regarding the applicability of fractal analysis in the assessment of surfaces severely worn by the combined effect of brittle microcracking and plastic deformation mechanisms.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Morphologic characterization and fractal analysis of lapped and polished surfaces of quartz single crystals

Ţălu

Guzzo

Salerno

et al. 2021

Microscopy Res & Technique

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“…The hegemony of quartz monocrystal in the precision electronics industry is owing to the linearity and the stability of its elastic constants with temperature, the possibility to stimulate pure vibration modes using the converse piezoelectric effect and the availability of high-quality cultured (synthetic) crystals at relatively low cost [1][2][3]. However, bulk acoustic wave devices require quartz structures with high machining quality and strain-free surfaces to assure their metrological accuracy in vibrating frequency [4][5][6]. These tasks are not easy to achieve if one considers the necessity to manufacture complex 3D structures using a workpiece material such as crystalline quartz (SiO 2 ): the hard, brittle, insulator, and anisotropic.…”

Section: Introductionmentioning

confidence: 99%

Multifractal analysis of ultrasonically machined surfaces of cylindrical quartz crystals: the effect of the abrasive grits

Ţălu¹,

Guzzo²,

Astinchap³

et al. 2021

Surf. Topogr.: Metrol. Prop.

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Since synthetic quartz is essential to produce 3-D resonators for numerous applications in precision electronics, in this work the surface topography of cylindrical quartz bars is investigated using the multifractal technique. The cylindrical bars were manufactured with ultrasonic machining using with five SiC grits ranging from 6 to 50 µm. The machined surfaces were initially characterized by contact profilometry and scanning electron microscopy (SEM). The multifractality of the machined surfaces was scrutinized using a box-counting method applied to the images obtained with 500X magnification. The multifractal spectrum indicated that the fractal dimension f(α) and the width of the fractal spectrum Δα are dependent on the grit size, but this dependence is not monotonic. The lowest (negative) value for Δf(α) was found for 25 µm grits indicating that for these grits the lower frequency events (grooves with tens µm width occurring along the USM direction) controls the surface topography much more than high frequency events related to brittle microcracking. The abrasive wear due to the continuous slurry recycling in lateral tool-workpiece interfaces contributed to smooth the groove texture as well as the sharpness of microscopic indentations, which remained observed on the surfaces machined with 50 µm grits. The opposite paths observed for the arithmetical mean deviation of the measured profile (Ra) and Δf(α) parameters with the cutting rate measured for each grit size were valuable to differentiate flat-rough and unlevelled-rough topographies in quartz bars.

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