Surface Treatment and Characterization of Indium–Tin-Oxide Thin Films Modified Using Cyclonic Atmospheric-Pressure Plasma

Tsai, Chieh-Yuan; Huang, Chun

doi:10.7567/jjap.52.05eb01

Cited by 11 publications

(8 citation statements)

References 29 publications

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“…The detected nitrogen and oxygen emissions are attributed to the excitation of air around the Ar plasma jet in open space and the observation of OH emission is attributed to H 2 O in air. [17][18][19] Two intensive emission lines, which are the OH line at 309 nm and the Ar line at 763 nm, were used to estimate the spatial uniformity of the wide plasma jet. The results are shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials

Kim

Sakakita

Ohsaki

et al. 2014

Jpn. J. Appl. Phys.

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Atmospheric pressure chemical vapor deposition (APCVD) has preferable properties to the mass production of carbon nanomaterials. Here, we describe a specially-designed microwave-excited atmospheric pressure plasma jet (MW-APPJ) with a 10-mm-wide nozzle based on microstrip line. The MW-APPJ is applied to an APCVD process and nanocrystalline diamond films are successfully deposited on silicon substrates using a mixture gas of Ar/CH4/H2 even in ambient air. The MW-APPJ technology could be suitable for the large-area APCVD system for the synthesis of carbon nanomaterials due to its arrayed configuration for the enlargement of plasma area.

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Section: Resultsmentioning

confidence: 99%

Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials

Kim

Sakakita

Ohsaki

et al. 2014

Jpn. J. Appl. Phys.

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“…This study utilized the plasma cyclone system to polymerize a carbon-silicon (organosilicon) film. The specific point of this plasma cyclone is to increase the plasma polymerization region by twisting discharges, as depicted in Figure 1a [13,14]. The indoor temperature and humidity in the laboratory are controlled by the consistent air conditioning system to remove moisture and the digital temperature and humidity sensor are always monitored for the variation of the indoor temperature and humidity.…”

Section: Experimental Methodsmentioning

confidence: 99%

The investigation of deposited organic carbon‐silicon films using cyclonic atmospheric pressure plasma polymerization

Wang

Huang

2023

J Chinese Chemical Soc

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BackgroundThe upgrading of atmospheric‐pressure plasma polymerization process, the detailed investigation of atmospheric‐pressure plasma polymerization deposited organic carbon‐silicon film features is essential to obtain the further understandings into the optimizing coating techniques.AimThis investigation demonstrates plasma cyclone deposited film features with adjusting argon gas flow rate and HMDSN monomer flow rate.MethodThis study utilized the plasma cyclone system to polymerize a carbon‐silicon film. In this study, Optical Emission Spectroscopy (OES) was employed as a diagnostic tool to indirectly inspect the chemical composition of the atmospheric‐pressure plasma polymerization's glow discharge by detecting the photo‐emitting species. The Contact Angle Goniometer, ATR‐FTIR, AFM, and XPS were used to measure the surface properties of the films deposited by plasma cyclone.ResultsThe static contact angle results show that most of the deposited films obtain the divergent contact angle values with adjusting argon gas flow rate and HMDSN monomer flow rate. ATR‐FTIR results show that argon gas flow rate and HMDSN monomer flow rate dominate the porosity of plasma cyclone deposited film surface. XPS and AFM analyses also detect the comparable trend of physicochemical characteristics of organic carbon‐silicon film with adjusting argon gas flow rate and HMDSN monomer flow rate. In summary, the organic carbon‐silicon films can be successfully polymerized by plasma cyclone.ConclusionsThe results refer that the organic carbon‐silicon film deposition on vanadium redox flow battery separator surface improved the electrolyte uptake of the cyclonic‐plasma‐coated separators was larger than that of a commercial separator.

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“…The double-pipe discharge jets used for surface modification using cyclonic atmospheric-pressure plasma are similar to those reported in Refs. [13][14][15][16][17][18]. The diffusing glow gradually fills the reactor region.…”

Section: Experimental Methodsmentioning

confidence: 99%

Atmospheric-pressure-plasma-enhanced fabrication of nonfouling nanocoatings for 316 stainless steel biomaterial interfaces

Huang¹,

Lin²,

Li³

et al. 2018

Jpn. J. Appl. Phys.

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Atmospheric-pressure plasma, which was generated with electrical RF power, was fed to a tetramethyldisiloxane/argon gas mixture to prepare bioinert organosilicon coatings for 316 stainless steel. The surface characteristics of atmospheric-pressure-plasma-deposited nanocoatings were evaluated as a function of RF plasma power, precursor gas flow, and plasma working distance. After surface deposition, the chemical features, elemental compositions, and surface morphologies of the organosilicon nanocoatings were examined. It was found that RF plasma power and plasma working distance are the essential factors that affect the formation of plasma-deposited nanocoatings. Fourier transform infrared spectroscopy spectra indicate that the atmospheric-pressure-plasma-deposited nanocoatings formed showed inorganic features. Atomic force microscopy analysis showed the surface roughness variation of the plasma-deposited nanocoating at different RF plasma powers and plasma working distances during surface treatment. From these surface analyses, it was found that the plasma-deposited organosilicon nanocoatings under specific operational conditions have relatively hydrophobic and inorganic characteristics, which are essential for producing an anti-biofouling interface on 316 stainless steel. The experimental results also show that atmospheric-pressure-plasma-deposited nanocoatings have potential use as a cell-resistant layer on 316 stainless steel.

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Surface Treatment and Characterization of Indium–Tin-Oxide Thin Films Modified Using Cyclonic Atmospheric-Pressure Plasma

Cited by 11 publications

References 29 publications

Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials

Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials

The investigation of deposited organic carbon‐silicon films using cyclonic atmospheric pressure plasma polymerization

Atmospheric-pressure-plasma-enhanced fabrication of nonfouling nanocoatings for 316 stainless steel biomaterial interfaces

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