Technology of creating electrical and electronic systems on flexible substrates, with special emphasis on textile substrates, is one of the most important areas in the field of developing textronics, which is applicable in protective clothes. Resistance and ampacity are the key parameters of electrically conductive thin layers formed on such substrates. Authors of this paper present the results of research related to creation of thin-layered, electrically conductive structures on substrates using a vacuum technology of layer application and assess the scope of their usefulness. Measurement of averaged surface temperature and thermal energy emitted at the surface of the structure will be the subject to metrological evaluation. The authors present developed method with Peltier cells used for measuring the average temperature and emitted heat to evaluate these parameters. The described method allows measurement of average values by matching the dimensions of the cell to the surface. The proposed method avoids possible temperature gradient around the point of measure which occurs in contact methods. The test results also pertain to the determination of the resistance of the test surfaces using a balance of generated thermal power which allows evaluation of the process of creating layers.