“…These include, measurement of the torsional vibration of an oscillating tube, acoustic wave sensors, thickness shear mode resonators, and oscillating fibre sensors. [9], [10], [11], [12], [13] Some of the earliest work using an oscillating microstructure for measuring viscosity was carried out by Andrews et.al. [14] This work clearly demonstrated that, the phase angle between the driving force and resulting motion of an oscillating microstructure may be related to the viscosity of the gas via an expression for the squeeze-film damping ratio of the microstructure.…”