Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition

You, Jiachuan; Zhao, Lei; Diao, Hongwei; Wang, Wenjing

doi:10.1007/s10854-020-05034-7

Cited by 7 publications

(1 citation statement)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The more severe influence of

f_{\left(\text{PH}\right)_{3}}

on the dark conductivity in Figure 2 for the nc‐SiO x :H films prepared at higher

f_{\left(\text{CO}\right)_{2}}

could be due to the achievement of the effective doping in the amorphous phase by increasing the amount of the doping source. [ 33 ] An increase of the absorption coefficient at the low energy range can be found in Figure 5Sb, Supporting Information when increasing

f_{\left(\text{PH}\right)_{3}}

, revealing more active dopants in the doped films.…”

Section: Discussionmentioning

confidence: 95%

Synergetic Effect of Gas Compositions on Material Properties of n‐Type Nanocrystalline Silicon Oxide Prepared by Plasma‐Enhanced Chemical Vapor Deposition

Qiu,

Duan,

Lambertz

et al. 2024

Solar RRL

View full text Add to dashboard Cite

Hydrogenated nanocrystalline silicon oxide (nc‐SiOx:H) has drawn extensive attention during the past years for the utilization in the silicon heterojunction (SHJ) solar cells. This material is demonstrated to be the key for the performance improvement of SHJ solar cells. In the present work, the influence of the process gas compositions on the optical, electronic, chemical and structural properties of n‐type nc‐SiOx:H films at the thickness of 38nm were systematically investigated. The synergetic effect of CO2 & PH3 gas flow fraction (fCO2 & fPH3) and the synergetic effect of CO2 & SiH4 gas flow fraction (fCO2 & fSiH4) on the growth of nc‐SiOx:H (n) films were demonstrated. Creatively combining the Fourier‐transform infrared (FTIR), UV‐Raman scattering spectroscopy, spectroscopy ellipsometry (SE) and photo‐thermal deflection spectroscopy (PDS) measurement, the mechanism behind the synergetic effect of the gas compositions on the material properties is analyzed.This article is protected by copyright. All rights reserved.

show abstract

“…The more severe influence of