Synthesis and characterization of vanadium oxide films by post-oxidation and reactive sputtering

Khodin, A. A.; Hwang, Hak-In; Hong, Sungmin; Zalessky, V.; Leonova, T.; Belov, M. M.; Outkina, E. A.

doi:10.1016/j.mseb.2007.06.026

Cited by 6 publications

(4 citation statements)

References 12 publications

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“…120 From a practical point of view, VO 2 may be awkward to prepare since the vanadium ions are in states with intermediate oxidation and it may be more facile to fabricate materials under nonoxidizing ͑metallic V͒ or fully oxidizing ͑in-sulating V 2 O 5 ͒ conditions. The limitations are not as stringent as they may seem, though, and it should be observed that metallic vanadium can be transformed to VO 2 by controlled oxidation [121][122][123][124] and that insulating V 2 O 5 van be transformed to VO 2 by controlled reduction in films. [125][126][127] There is a tendency that limited dimensions decreases c and widens the hysteresis in nanocrystalline films 46,48,[128][129][130][131][132][133][134][135] and nanorods.…”

Section: Discussionmentioning

confidence: 99%

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Li¹,

Niklasson²,

Granqvist³

2010

Journal of Applied Physics

241

192

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VO 2 -based films are thermochromic and show infrared reflectance above a "critical" temperature in the vicinity of room temperature. Implementations on energy efficient windows have been discussed for decades but have been severely curtailed since the luminous absorptance is undesirably large and the solar energy transmittance modulation is too small. Here we show by calculations based on effective medium theory that dilute composites with VO 2 nanoparticles embedded in hosts with properties mimicking glass or polymer can yield significantly decreased luminous absorption jointly with much enhanced transmittance modulation of solar energy. These results demonstrate that VO 2 -based nanothermochromics opens new avenues toward energy efficient fenestration.

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Section: Discussionmentioning

confidence: 99%

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Li¹,

Niklasson²,

Granqvist³

2010

Journal of Applied Physics

241

192

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“…The substrate peaks are marked by '*'. It is observed that the peaks of {00l} family correspond to the layered structure as is evident from the presence of peak corresponding to (002) [19]. The occurrence of (222) family of planes can be attributed to the oriented nature of growth.…”

Section: Resultsmentioning

confidence: 90%

Novel single phase vanadium dioxide nanostructured films for methane sensing near room temperature

Prasad

Amirthapandian

Dhara

et al. 2014

Sensors and Actuators B: Chemical

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Methane (CH 4 ) gas sensing properties of novel vanadium dioxide (VO 2 ) nanostructured films is reported for the first time. The single phase nanostructures are synthesized by pulsed dc-magnetron sputtering of V target followed by oxidation in O 2 atmosphere at 550°C. The partial pressure of O 2 is controlled to obtain stoichiometric VO 2 with the samples showing rutile monoclinic crystalline symmetry and regions of rod shaped nano-architectures. These nanostructured films exhibit a reversible semiconductor to metal transition in the temperature range of 60-70°C. Gas sensing experiments are carried out in the temperature span from 25°C to 200°C in presence of CH 4 . These experiments reveal that the films respond very well at temperatures as low as 50°C, in the semiconducting state.

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“…A lot of techniques have been applied to deposit VO X thin films, such as reactive sputtering, pulsed laser deposition, sol-gel process and evaporation. Among these methods, reactive sputtering is the common method in producing VOx films because it has many advantages in process stability and production cycle time (a high deposition rate) (6).…”

Section: Introductionmentioning

confidence: 99%

Deposition of VO_X Films by Reactive Sputtering and its Properties

Wei

Zhang

Wang³

et al. 2011

ECS Trans.

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VO X thin films were deposited on the Cu/Ti/SiO 2 substrates by reactive sputtering at room temperature and annealed under vacuum at different temperatures. The crystal structure and morphology of VO X films were characterized respectively by XRD and AFM, while the electrical switching properties were tested by Semiconductor Device Analyzer. The effects of annealing temperature on structure and morphology were discussed. Results showed that the film as-deposited was amorphous, and crystallized into different phases (e.g. V 2 O 5 , V 2 O 3 etc.) with the increasing of annealing temperature. AFM results indicated that the crystal grain sizes of VO X thin films were enlarged from 300 to 500℃. The insitu morphologies have obvious changes from RT to 75℃. The device unit produced by films annealed at 400℃ can achieve a reversible metal-insulator transition (MIT), whose reset and set voltage are 0.56V and 1.12V, respectively.

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Synthesis and characterization of vanadium oxide films by post-oxidation and reactive sputtering

Cited by 6 publications

References 12 publications

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Novel single phase vanadium dioxide nanostructured films for methane sensing near room temperature

Deposition of VO_X Films by Reactive Sputtering and its Properties

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Synthesis and characterization of vanadium oxide films by post-oxidation and reactive sputtering

Cited by 6 publications

References 12 publications

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Nanothermochromics: Calculations for VO2 nanoparticles in dielectric hosts show much improved luminous transmittance and solar energy transmittance modulation

Novel single phase vanadium dioxide nanostructured films for methane sensing near room temperature

Deposition of VOX Films by Reactive Sputtering and its Properties

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Deposition of VO_X Films by Reactive Sputtering and its Properties