2014
DOI: 10.1116/1.4859260
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Synthesis and deposition of metal nanoparticles by gas condensation process

Abstract: In this work, the synthesis of Pt and Ag nanoparticles by means of the inert gas phase condensation of sputtered atomic vapor is presented. The process parameters (power, sputtering time, and gas flow) were varied in order to study the relationship between deposition conditions and properties of the nanoparticles such as their quantity, size, and size distribution. Moreover, the gas phase condensation process can be combined with a plasma enhanced chemical vapor deposition procedure in order to deposit nanocom… Show more

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Cited by 28 publications
(13 citation statements)
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“…It has previously been reported that an increased flow speed increases the deposition rate of platinum and silver particles, which was attributed to more ejected material at higher flows. 11 This mechanism is consistent with the size trends seen at 177, 215, and 249 Pa, but in contradiction with the opposite trends seen at 107 and 143 Pa. Equation (1) predicts that the partial pressure of oxygen is decreased at higher gas flows.…”
Section: Crosses Represent Where Oxygen Had To Be Introduced In Ordersupporting
confidence: 44%
See 1 more Smart Citation
“…It has previously been reported that an increased flow speed increases the deposition rate of platinum and silver particles, which was attributed to more ejected material at higher flows. 11 This mechanism is consistent with the size trends seen at 177, 215, and 249 Pa, but in contradiction with the opposite trends seen at 107 and 143 Pa. Equation (1) predicts that the partial pressure of oxygen is decreased at higher gas flows.…”
Section: Crosses Represent Where Oxygen Had To Be Introduced In Ordersupporting
confidence: 44%
“…When the gas flow was increased and the pressure was kept constant, there was no increase in the mean nanoparticle size but an increase in the width of the size distribution. Maicu et al 11 utilized a hollow cathode based cluster source where the pressure was increased by adjusting the gas flow. This combined increase in both flow and pressure, increased the nanoparticle size and size distribution.…”
mentioning
confidence: 99%
“…It is a low-temperature method that uses polar solvents, which are used under pressure and at above their boiling points. Inert gas condensation (IGC) methods involve evaporation of metals by vacuum chambers filled with inert gas at a typical pressure of 100 Pa. IGC is a highly efficient method for the synthesis of good quality silver and PtNPs [35]. In this method, inter atomic collision occurs between gas atoms within a chamber, and the evaporated metal atoms lose their kinetic energy to condense in the form of a crystal which accumulates in liquid nitrogen.…”
Section: Physical Methodsmentioning
confidence: 99%
“…Thus the results in the literature cannot be directly compared to the results found here. The observed size increase could be due to a more efficient extraction of sputtered material from the hollow cathode at the higher pressure [50].…”
Section: Size Control By Pressure and Gas Flowmentioning
confidence: 99%