Synthesis and Growth Mechanism of Thin-Film TiO₂ Nanotube Arrays on Focused-Ion-Beam Micropatterned 3D Isolated Regions of Titanium on Silicon

Abstract

In this paper, the fabrication and growth mechanism of net-shaped micropatterned self-organized thin-film TiO2 nanotube (TFTN) arrays on a silicon substrate are reported. Electrochemical anodization is used to grow the nanotubes from thin-film titanium sputtered on a silicon substrate with an average diameter of ~30 nm and a length of ~1.5 μm using aqueous and organic-based types of electrolytes. The fabrication and growth mechanism of TFTN arrays from micropatterned three-dimensional isolated islands of sputtered titanium on a silicon substrate is demonstrated for the first time using focused-ion-beam (FIB) technique. This work demonstrates the use of the FIB technique as a simple, high-resolution, and maskless method for high-aspect-ratio etching for the creation of isolated islands and shows great promise toward the use of the proposed approach for the development of metal oxide nanostructured devices and their integration with micro- and nanosystems within silicon-based integrated-circuit devices.

Self‐Organised TiO2 Nanotubes for 2D or 3D Li‐Ion Microbatteries

“…Another interesting approach through which to achieve extra porosity has been reported by Hamedani et al. ;171 they used focused ion beam (FIB) microscopy to pattern a microarray of titanium thin‐film on a substrate, and, by anodisation, micro‐patterned self‐organised TiO 2 nanotubes with extra porosity were obtained. Nevertheless, the approach of anodising a titanium mesh is currently much easier and more cost effective 124…”

Efficient improvement of photoelectrochemical activity for multiple semiconductor (CdS/PbS/ZnS) co-sensitized TiO2 photoelectrodes by hydrogen treatment

“…2,3 However, TiO 2 nanoparticles structure has trap sites that cause charge recombination at the contact interface between TiO 2 nanoparticles. [5][6][7] Thus, it shows higher change collection efficiency than other TiO 2 nanometer materials. 4 In this study, TiO 2 nanotubes with nanowires directly formed on top (denoted as TiO 2 NTWs) was prepared by electrochemical anodization on a titanium foil.…”

Enhancement of electrochemical properties of micro/nano electrodes based on TiO2 nanotube arrays

“…T iO 2 nanotube arrays were fabricated using various approaches, for example, template, anodization and hydrothermal synthesis [1]. Anodization is the most common process due to its low cost, it is also an environmentally friendly and highly controllable process by which highly ordered arrays can be fabricated with different tube morphologies.…”