In this contribution, three polymerizable benzophenone photoinitiators containing maleimide group including 4‐maleimidebenzophenone (MBP), 4‐chlorine‐4′‐maleimide benzophenone (CMBP), and 4‐maleimide‐4′‐[(4‐maleimide)thiophenyl]benzophenone (MMTBP) were designed and synthesized to enhance the polymerization degree of photosensitive polysiloxane containing methacryloxy active groups (MAPSO). The polymerization behaviors of the MAPSO cured by different photoinitiators were investigated using Fourier transform infrared (FTIR). It was noted that the MAPSO initiated by MMTBP showed a high carbon–carbon double bond conversion above 80% because of the existence of thiophenyl group which could generate more radicals from the photolysis reaction at the CS bond. In addition, the thermal stability of the UV‐cured MAPSO were studied by thermogravimetric analysis (TGA), the result showed that the initial 5% mass loss (T5%) and residual weight percent at 800 °C in nitrogen of the UV‐cured MAPSO initiated by MMTBP systems was 200 °C and 33.8%. Thus, this work provides a new perspective and efficient strategy to improve the polymerization degree of UV‐curable polysiloxanes with carbon–carbon double bonds. © 2017 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2017, 55, 1696–1705