2005
DOI: 10.1016/j.jnoncrysol.2005.06.038
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Synthesis and pyrolysis of novel polysilazane to SiBCN ceramic

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Cited by 44 publications
(30 citation statements)
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“…When the polymer precursor is heated, side-chain groups will break; organic molecules with low molecular weight will volatilize; dehydrogenation, cross-linking, and polycondensation will occur in the polymer [35]. When temperature is increased to 1000 ℃, pyrolyzing finishes and the remaining product is an inorganic ceramic with an amorphous structure [44]. For the preparation of Si-B-C-N ceramic by this method, five steps are generally required: organic polymer synthesis; distillation, cross linking and curing of the polymer; grinding and shaping of the polymer precursor; pyrolyzing of the shaped precursor at high temperatures in an inert atmosphere; and annealing the as-pyrolyzed ceramic at higher temperatures in an inert atmosphere [3,12,39,[45][46][47].…”
Section: Organic Polymer Pyrolyzing Routementioning
confidence: 99%
“…When the polymer precursor is heated, side-chain groups will break; organic molecules with low molecular weight will volatilize; dehydrogenation, cross-linking, and polycondensation will occur in the polymer [35]. When temperature is increased to 1000 ℃, pyrolyzing finishes and the remaining product is an inorganic ceramic with an amorphous structure [44]. For the preparation of Si-B-C-N ceramic by this method, five steps are generally required: organic polymer synthesis; distillation, cross linking and curing of the polymer; grinding and shaping of the polymer precursor; pyrolyzing of the shaped precursor at high temperatures in an inert atmosphere; and annealing the as-pyrolyzed ceramic at higher temperatures in an inert atmosphere [3,12,39,[45][46][47].…”
Section: Organic Polymer Pyrolyzing Routementioning
confidence: 99%
“…165) Lee et al developed a method which is more or less identical with that of Jansen,166) without purification of the intermediate product. It consisted in the mixing of hexamethyldisilazane with boron trichloride and trichlorosilane and subsequent heating of the solution at 200°C.…”
Section: Jcs-japanmentioning
confidence: 99%
“…Therefore, the design of a new type of high temperature temperature sensor detection system for many harsh environments temperature detection is of great significance.With the development of materials science, a temperature sensor based on SiBCN (silicon boron carbonitride) ceramic material was developed. The sensor is a new type of sensor under the development trend of radio frequency microwave technology, which has good high temperature thermal stability and anti-oxidation [1]. Figure 1 shows a top view and a side cross-sectional view of a SiBCN ceramic sensor.…”
Section: Introductionmentioning
confidence: 99%