Anhydrous compounds are crucially important for many technological applications, such as achieving high performance in lithium/sodium cells, but are often challenging to synthesize under hydrothermal conditions. Herein we report that a modified solvo-/hydro-fluorothermal method with fluoride-rich and water-deficient condition is highly effective for synthesizing anhydrous compounds by the replacement of hydroxyl groups and water molecules with fluorine. Two anhydrous phosphate germanium fluorides, namely, Na[GeF(PO)] and K[GeF(PO)], with chainlike structures involving multiple fluorine substitutions, were synthesized using the modified solvo-/hydro-fluorothermal method. The crystal structure of Na[GeF(PO)] is constructed by the common single chains {[GeF(PO)]} built from alternating GeOF octahedra and PO tetrahedra. For K[GeF(PO)], it takes the same single chain in Na[GeF(PO)] as the backbone but has additional flanking GeOF octahedra via an O-corner of the PO groups, resulting in a dendrite zigzag single chain {[GeF(PO)]}. The multiple fluorine substitutions in these compounds not only force them to adopt the low-dimensional structures because of the "tailor effect" but also improve their thermal stabilities. The thermal behavior of Na[GeF(PO)] was investigated by an in situ powder X-ray diffraction experiment from room temperature to 700 °C. The modified solvo-/hydro-fluorothermal method is also shown to be effective in producing the most germanium-rich compounds in the germanophosphate system.