Synthesis and Thermal Decomposition Mechanism Study of a Novel Iridium Precursor

Abstract

Abstract. Ir(TFA)3 (TFA=1,1,1-trifluoro-2,4-pentanedionate) metal complexes with high purity was successfully synthesized. The metal complexes have been characterized by elemental analysis, infrared spectroscopy, nuclear magnetic resonance spectroscopy. The volatility of metal complexes was studied by thermogravimetry analysis. And a possible decomposition mechanism was studied by mass spectroscopic analysis method. The novel iridium complexes can be severed as precursor in metalorganic chemical vapor deposition of iridium films. iridium films were deposited by metalorganic chemical vapor deposition method, and the Ir(TFA)3 complex was used as precursor. The iridium thin films were characterized by X-ray diffraction and scanning electron microscopy in order to determine crystallinity and surface morphology.

Synthesis, spectroscopic characterizations and biological studies on gold(III), ruthenium(III) and iridium(III) complexes of trimethoprim antibiotic drug

“…The crystallinity in the powder X-ray diffraction data was moderate. The Bragg reflections at 40º, 46º, and 67º in the XRD patterns of the [Ir(TMP)2(Cl)2].Cl complex (Figure 5C) match the indexed planes of the iridium metal crystals (111), (200), and (220) [38].…”

Volatile Iridium and Platinum MOCVD Precursors: Chemistry, Thermal Properties, Materials and Prospects for Their Application in Medicine

“…The traditional approach to the synthesis of iridium(III) β-diketonates consists in the interaction of iridium(III) chloride with the corresponding β-diketone or its salt in water-alcohol solutions with controlled pH [19,20]. However, the yields of the products do not exceed 15%-20%, since the reaction is complicated by the formation of monomeric and dimeric complexes of iridium(III) with γC-bound β-diketones [19], as well as heteroligand complexes of polymer structure formed as a result of competition between acetylacetonate and acido-ligands [21].…”

“…In the presence of oxygen, the initial decomposition temperature reduces to 220 • C, and the final decomposition products are water vapor and carbon dioxide [25]. Recently, a mechanism of Ir(tfac) 3 vapor under electron impact at 160 • C has been proposed [20].…”

Mechanism of dicarbonyl(2,4-pentanedionato)iridium(I) decomposition on iron surface and in gas phase: Complex experimental and theoretical study

“…To date, a wide number of iridium complexes with β-diketones and their derivatives, cyclopentadienyls, alkenes, carbonyls, phosphines and other ligands have been proposed as MOCVD precursors [11,12 and references therein, [20][21][22][23]. Nevertheless, the investigations of vapor thermal destruction on the heated surface have only been carried out for Ir(acac)3 (acac = acetylacetonato) [24,25], Ir(cod)(acac) (cod = cyclooctadiene-1,5) [26], Ir(cod)(MeCp) (MeCp = methylcyclopentadienyl) [26] and Ir(acac)(CO)2 [24,27] complexes.…”