Synthesis, bulk, surface and microlithographic characterization of poly(1-butene sulfone)-g-poly(dimethylsiloxane)

DeSimone, Joseph M.; York, G. A.; McGrath, James E.; Gozdz, A. S.; Bowden, M. J.

doi:10.1021/ma00019a019

Cited by 51 publications

(18 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Triethylaluminum (TEA) was diluted with heptane to 1 M concentration. Hydroxy telechelic polydimethylsiloxane (PDMS) was prepared by ring‐opening polymerization of D3 and D4 cycles13, 14 and subsequently submitted to a hydrosilylation reaction.…”

Section: Methodsmentioning

confidence: 99%

Influence of the chemical structure of transfer agents in coordinated anionic ring‐opening polymerization: application to one‐step functional oligomerization of ε‐caprolactone

Pantiru

Iojoiu

Hamaide

et al. 2004

Polymer International

View full text Add to dashboard Cite

Coordinated anionic ring‐opening polymerization of ε‐caprolactone in the presence of alcohols enables functional oligocaprolactones to be obtained easily in a single step. As observed by NMR and Maldi Tof mass spectroscopy, the functionalization of the oligomers, as well as the molecular weight distribution, depend strongly on the chemical structure of the alcohol. Hydroxy telechelic polymers can also be used as transfer agents. Finally, it was found that the chemical nature of the alcohol has a great influence on the kinetics, which suggests a coordination of this moiety on the Lewis site, during all the reaction. Copyright © 2004 Society of Chemical Industry

show abstract

Section: Methodsmentioning

confidence: 99%

Influence of the chemical structure of transfer agents in coordinated anionic ring‐opening polymerization: application to one‐step functional oligomerization of ε‐caprolactone

Pantiru

Iojoiu

Hamaide

et al. 2004

Polymer International

View full text Add to dashboard Cite

show abstract

“…In a final approach comb-type copolymers are being prepared by terpolymerisations of sulfur dioxide with an alkene and a macromer containing an alkene end-group. A similar approach has been reported by De Simone et al [6,7], however we are using controlled radical polymerization techniques to generate macromers, which allows significant diversity in the choice of monomers. The high sensitivity of polymer sulfones will impart high degradability to the main chain, while the comb chains arising from the alkene-functionalized macromers will impart the required mechanical and thermal properties to the final polymer.…”

Section: Polysulfonesmentioning

confidence: 99%

Development of polymers for non-CAR resists for EUV lithography

Whittaker

Blakey

Blinco

et al. 2009

Advances in Resist Materials and Processing Technology XXVI

View full text Add to dashboard Cite

Three strategies for approaching the design and synthesis of non-chemically amplified resists (non-CARs) are presented. These are linear polycarbonates, star polyester-blk-poly(methyl methacrylate) and comb polymers with polysulfone backbones. The linear polycarbonates were designed to cleave when irradiated with 92 eV photons and high T g alicyclic groups were incorporated into the backbone to increase T g and etch resistance. The star block copolymers were designed to have a core that is sensitive to 92 eV photons and arms that have the potential to provide properties such as high T g and etch resistance. Similarly the polysulfone comb polymers were designed to have an easily degradable polymer backbone and comb-arms that impart favorable physical properties. Initial patterning results are presented for a number of the systems.

show abstract

“…[4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] In addition, gradient morphologies are rarely formed in the immiscible polymer blends containing the PDMS or fluoro-containing polymers. 20,21 This kind of heterogeneity should be originated from coupling the large difference of the surface energies of the components with the other factors dominating thermodynamic situation, molecular dynamics, and so on.…”

Section: -15mentioning

confidence: 99%

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] The extremely low surface energy of the Si-containing polymers, such as poly(dimethylsiloxane) (PDMS), causes surface segregation in the polymer blends and block copolymer in analogy with fluorocontaining polymers. [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] In addition, gradient morphologies are rarely formed in the immiscible polymer blends containing the PDMS or fluoro-containing polymers. 20,21 This kind of heterogeneity should be originated from coupling the large difference of the surface energies of the components with the other factors dominating thermodynamic situation, molecular dynamics, and so on.…”

mentioning

confidence: 99%

Surface Enrichment and Bulk Morphology in Mixtures of Poly(methyl methacrylate) with Poly(dimethylsiloxane)

Seki

Lee²,

Akiba

et al. 2004

Polym J

View full text Add to dashboard Cite

KEY WORDSPoly(dimethylsiloxane) / Poly(methyl methacrylate) / Surface Enrichment / Morphology / Cross-linking / Solvent Evaporation / [DOI 10.1295/polymj.36.556] Because Si-containing polymers have extremely low surface energy, they show unique behavior in polymer materials. Therefore, the properties and synthesis of the Si-containing polymeric materials have been extensively investigated. 1-15The extremely low surface energy of the Si-containing polymers, such as poly(dimethylsiloxane) (PDMS), causes surface segregation in the polymer blends and block copolymer in analogy with fluorocontaining polymers. [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] In addition, gradient morphologies are rarely formed in the immiscible polymer blends containing the PDMS or fluoro-containing polymers. 20,21 This kind of heterogeneity should be originated from coupling the large difference of the surface energies of the components with the other factors dominating thermodynamic situation, molecular dynamics, and so on.22,23 Therefore, various morphologies should be prepared by adjustment balance of the surface energy and the other variable factors in these polymer blends. When these types of the polymer blends are prepared by solution casting, it has been found that rate of solvent evaporation and miscibility is one of the most dominate factors to determine the distribution of the dispersed domains. [24][25][26][27] If the systems contain cross-linkable (reactive) components, the reactions should also be a dominate factor on the morphological heterogeneity. Therefore, in the polymer blends containing the cross-linkable ,!-divinyl terminated PDMS, 28,29 the morphologies should be changed with the heterogeneity of compositional distributions and cross-linking reaction. Thus, in this study, we investigate morphologies of the cross-linkable PDMS-containing polymer blends prepared by solution casting. EXPERIMENTAL,!-Divinyl-terminated PDMS, platinum-divinyltetramethylsiloxane (Pt), and cyclic hydride-containing cross-linking agent (CHC) were supplied from Dow Corning Asia Ltd. Poly(methyl methacrylate) (PMMA) was supplied from Mitsubishi Rayon Co., Ltd. Molecular characteristics of PDMS and PMMA were listed in Table I. All the samples were used as received.PMMA/PDMS blend films containing 10 wt % PDMS were prepared by solution casting. The polymers were dissolved in chloroform (CHCl 3 ) or tetrahydrofuran (THF) at 5 wt %. CHC (2 wt % to the PDMS) and small amount of Pt were added to them. The solutions were stirred until they became homogeneous. After that, the solvents were evaporated on glass plate for 24 h at ambient temperature. The resulting uncross-linked PMMA/PDMS films with ca. 200 mm thickness were further dried in reduced pressure for 1 week. The uncross-linked PMMA/PDMS (90/10) blends prepared from CHCl 3 and THF solutions are represented as UCL-C and UCL-T, respectively. Rates of solvent evaporation in preparation of the UCL-C and UCL-T are 1.3 and 25% evaporation min À1 , respectively. Finally, the uncross-...

show abstract

Synthesis, bulk, surface and microlithographic characterization of poly(1-butene sulfone)-g-poly(dimethylsiloxane)

Cited by 51 publications

References 3 publications

Influence of the chemical structure of transfer agents in coordinated anionic ring‐opening polymerization: application to one‐step functional oligomerization of ε‐caprolactone

Influence of the chemical structure of transfer agents in coordinated anionic ring‐opening polymerization: application to one‐step functional oligomerization of ε‐caprolactone

Development of polymers for non-CAR resists for EUV lithography

Surface Enrichment and Bulk Morphology in Mixtures of Poly(methyl methacrylate) with Poly(dimethylsiloxane)

Contact Info

Product

Resources

About