Synthesis, microstructure and properties of SiCN ceramics prepared from tailored polymers

Ziegler, G.; Kleebe, Hans‐Joachim; Motz, Günter; Müller, H.; Traßl, Stephan; Weibelzahl, W.

doi:10.1016/s0254-0584(99)00114-5

Cited by 89 publications

(68 citation statements)

References 21 publications

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“…1 -4 Since the pioneering work of Verbeek and Winter 5 and Yajima et al 6 in the mid 1970s, polymer-based methods used to fabricate these non-oxide ceramics have been paid more attention compared with traditional grinding methods, 7 and many kinds of precursor, such as polycarbosilanes, polysilazanes, polyborazines, and polysilylenemethylenes, have been synthesized and converted to desired shapes, including fibers, films, monoliths and porous structures after pyrolysis. 8 -10 The advantages of the polymer-based methods, such as their intrinsic homogeneity on an atomic level and low processing temperatures, 11 stimulate the development of analogous metal-containing preceramic polymers in preparing functional solid-state materials that possess interesting electrical, magnetic and optical properties in addition to desired mechanical characteristics. 12 Ishikawa et al 13 synthesized an aluminum-containing polymer, polyaluminocarbosilane, and converted it to Si-Al-C-O ceramic fiber that exhibited extraordinary thermal and mechanical stabilities even up to 2200…”

Section: Introductionmentioning

confidence: 99%

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Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane

Wang

Kim

2005

Applied Organom Chemis

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A molybdenum-containing preceramic polymer, MoPMS, was synthesized for the first time by HCl elimination of polymethylsilane (PMS) and MoCl 5 at room temperature in tetrahydrofuran. The insoluble MoPMS prepared was embedded into the void spaces of a silica colloidal crystal template within the pot life of the polymer and successfully transformed to a three-dimensionally long-rangeordered macroporous SiC-MoSi 2 ceramic after pyrolysis at 1400 • C in an argon atmosphere followed by template removal in HF. The bead-inverse macroporous SiC-MoSi 2 ceramic, with a ceramic yield of about 88%, exhibits high temperature stability, high BET surface area, and semiconducting behavior. In addition, the macroporous SiC-MoSi 2 ceramic was used as a catalyst carrier for platinum-ruthenium coated on the surface of the pores. The preceramic polymer and the ceramic were characterized by IR, thermogravimetric analysis, X-ray diffraction, scanning and transmission electron microscopy, and BET surface area.

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Section: Introductionmentioning

confidence: 99%

“…7,11 However, an improved approach with higher precision formability is being demanded for newly emerging applications for electrically conductive components or small, precision parts with complex geometries, e.g. microelectrodes, microsensors or micromechanical and electronic devices.…”

Section: Introductionmentioning

confidence: 99%

Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane

Wang

Kim

2005

Applied Organom Chemis

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“…The synthesis processes of PCS and PSZ were mentioned elsewhere in details [17][18][19] . The inorganic processes of PCS and PSZ included curing and pyrolysis.…”

Section: Methodsmentioning

confidence: 99%

“…No obvious peak corresponding to SiC or Si 3 N 4 crystals present in the diffraction curves, which proves the main composition phase is amorphous SiC and SiCN in the PCS-and PSZ-derived ceramics, respectively. More details of the pyrolysis processes of PCS and PSZ at different temperatures were described in the previous reports [18,19] . It should be noted that, because of the well-known advance properties of the non-oxide ceramics, the small volume of the units, many controlling parameters and high controlling precision, the patterned SiC and SiCN microstructures achieved in this study might be possible to replace the polymer microstructures and applied in the microreactor and microfluidic controlling systems in which the complicated and precise manipulation (such as mixing, separation, chemical reaction and microanalysis, etc.)…”

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confidence: 99%

Preparation of patterned SiC and SiCN microstructures

Wang

Sung

et al. 2006

SCI CHINA SER E

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Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as preceramic polymers. The preparing process was followed by precursor infiltration, the curing of the precursor, demolding of the template and pyrolysis of the cured preceramic polymer pattern. It shows that the dimensions of the ceramic patterns can be tailored by using the PDMS molds with different dimensions. The produced ceramic microstructures can be potentially applied in high temperature and high pressure environments due to the advanced properties of the SiC and SiCN ceramics.With the development of modern science and technology, the importance of small structures or microstructures (such as the fluidic nanostructure or microreactor [1] , the integrate circuit in microelectronics [2] , the factory in a chip [3,4] , etc.) has been incarnated day by day in the fields of microelectronics, micro-optical systems, microanalytical systems, microelectromechanical systems and cytobiology. And the fabrication technique (microfabrication) of the small structures has become the hotspot of the world attention accordingly, in which photolithography is the most successful technology and has dominated the development of semiconductor industry [5] . However, photolithography is poorly suited for patterning nonplanar surfaces and can generate only two-dimensional microstructures. In addition, it is blocked to generate the microstructures in nanoscale due to the limitation of optical diffraction and opacity of the materials used for making lenses or photomasks. Other advanced microfabrication techniques explored currently, such as soft X-ray lithography, electron-beam writing, focused on ion beam writing and atomic lithography, are non-photolithography that are based on electron-beam, ion beam and atom www.scichina.com www.springerlink.com Preparation of patterned SiC and SiCN microstructures 165 beam, etc. [6][7][8][9] . But the surprisingly high cost of these techniques has limited their application. Thus, new and non-traditional pattering approaches must be developed.The soft lithography technique has been demonstrated to generate high-quality microstructures since 1990 and has been paid the most attention ever since then. It is a general term of a series of soft lithography such as self-assembles monolayers [10] , replica molding [11] , microcontact printing [12] , micromolding in capillaries (MIMIC) [13] , microtranster molding (μTM) [14] and solvent-assisted micromolding [15] , etc., in which an elastomeric mold or stamp with patterned relief structures on its surface that is used to transfer and replicate the patterns is the key to soft lithography. In addition, soft lithography is being paid more and more attention due to its low cost, high efficiency, simple technics and wide applications. It fits to many kinds surfaces with different compositions and chemical properties. Temporarily, patterned polymer micros...

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“…The reaction is known to be a mixture of a radical polymerization of vinyl functions and of a hydrosilylation between vinyl and hydride groups. 34) …”

Section: Characterization Of the Cross-linked Pe-filled Precursor Pszmsmentioning

confidence: 99%

Analysis of polyethylene-particle filled SiCN precursor and the resulting porous ceramics with emphasis on using micro computed tomography

Schmalz

Hausherr

Muller

et al. 2011

J. Ceram. Soc. Japan

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Porous, polymer derived SiCN ceramics are synthesized from a solid polysilazane (PSZMS) and an ultra-high molecular weight polyethylene (PE) as sacrificial filler. Common analytical methods for the investigation of the thermal decomposition processes and the formed (macro) porosities, such as thermogravimetry and mercury porosimetry respectively, were supplemented by micro computed tomography (µ-CT) measurements. Due to its non-destructive nature, this method enables the comparative analysis of both, the in the first step formed preceramic duromers, to distinguish between the different polymers, as well as the resulting porous ceramics. The via µ-CT determined values for the two polymer phases after cross-linking are in a good agreement with the used original amounts of PE and PSZMS. In contrast the values for the porosity resulting from the PE filler and for the formed SiCN ceramic after pyrolysis differ in greater extent due to the limiting resolution that can be achieved by applying µ-CT measurements.

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Synthesis, microstructure and properties of SiCN ceramics prepared from tailored polymers

Cited by 89 publications

References 21 publications

Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane

Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane

Preparation of patterned SiC and SiCN microstructures

Analysis of polyethylene-particle filled SiCN precursor and the resulting porous ceramics with emphasis on using micro computed tomography

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Synthesis, microstructure and properties of SiCN ceramics prepared from tailored polymers

Cited by 89 publications

References 21 publications

Macroporous SiCMoSi2ceramics from templated hybrid MoCl5–polymethylsilane

Macroporous SiCMoSi2ceramics from templated hybrid MoCl5–polymethylsilane

Preparation of patterned SiC and SiCN microstructures

Analysis of polyethylene-particle filled SiCN precursor and the resulting porous ceramics with emphasis on using micro computed tomography

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Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane

Macroporous SiCMoSi₂ceramics from templated hybrid MoCl₅–polymethylsilane