Synthesis of carbon films by magnetron sputtering of a graphite target using hydrogen as plasma-forming gas

Evaluation of Carbon thin Films Using Raman Spectroscopy

“…The 2D band (2660 cm -1 -2710 cm -1 ) is a double-resonance band. In monolayer graphene films its intensity reaches the maximum value (four times the value of the G band intensity) 12 . The structures of the sp 2 bonded carbon atoms consist of various graphitic forms varying from nanocrystalline graphite to glassy carbon.…”

Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique

“…Comparing the spectra previously reported 13 with those obtained in the present work, it can be seen that the film deposited under 15 mTorr is in the initial stage of crystallization. In this stage, the D band (vibrational mode of amorphous carbon) is more intense than the G band (vibrational mode of ordered carbon), and the 2D band that normally appears for graphite and graphene films, being much more intense than G band for the monolayer graphene structure.…”

“…Raman spectra obtained from different regions of a carbon film deposited by magnetron sputtering showed 5 stages 13 of growing crystallization. The first stage refers to the presence of disordered carbon atoms, the second one indicates a higher degree of crystallinity; the third one refers to single-crystalline graphite, the fourth one to the double layer graphene, and finally the fifth and last one to monolayer graphene 13 . These spectra, when overlaid, show that there is a reduction in the D band, a narrowing, and intensity increase in the G band, and the arising of the 2D band, as the film crystallizes from amorphous to the monolayer graphene 13 .…”

“…The literature reports that the transformation of amorphous carbon to graphene occurs by diffusion of carbon atoms through the catalyst metal 9 . The synthesis of graphene by epitaxial growth on transition metals has been previously reported [10][11][12][13] .…”

Towards scalable fabrication of ultrasmooth and porous thin carbon films

“…For instance, solid carbon films have been produced by sputtering [13,14], chemical vapor deposition [15], RF glow discharge/plasma [16,17], an ion beam generated from a cathodic arc discharge [16], and thermal pyrolysis of organic polymers [2,18e20]. The former four methods are capable of producing films with nanoscale roughness [16,17].…”