1993
DOI: 10.1063/1.109039
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Synthesis of diamond from methane and nitrogen mixture

Abstract: We have found that diamond can be synthesized from a mixture of CH4 and N2 without adding any H2. This new synthesis is sharply different from the common practice of diamond growth by chemical vapor deposition, which uses a hydrogen-rich mixture of CH4 and H2. In this new approach, nitrogen becomes an active component of microwave plasma leading to diamond growth. Nitrogen participates in abstraction of hydrogen from the diamond surface. We hypothesize that formation of HCN is an indication of hydrogen abstrac… Show more

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Cited by 109 publications
(46 citation statements)
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“…These observations are in agreement with our previous findings. 9 Moreover, a similar trend was reported by Badzian et al 11 or Bohr et al…”
Section: -supporting
confidence: 74%
See 1 more Smart Citation
“…These observations are in agreement with our previous findings. 9 Moreover, a similar trend was reported by Badzian et al 11 or Bohr et al…”
Section: -supporting
confidence: 74%
“…Nitrogen incorporation results in significant mechanical stress and increases the number of vacancy defects due to distortion of the diamond lattice. [9][10][11] Several articles were published on the influence of nitrogen on the growth rate and quality of diamond films. [10][11][12][13][14] These 15 experiments were done using gas mixtures of CH 4 /H 2 /N 2 in microwave plasma reactors.…”
mentioning
confidence: 99%
“…Thus, C involved in these reactions is badly incorporated in the growing film as evidenced by the very low C-N bonding rate observed from XPS and FTIR thin films analysis (Figure 2 and 3a). Such reactions of nitrogen and carbon producing carbonitride volatile species have also been reported by some authors working on the synthesis of diamond in CH 4 /N 2 plasma [41] or on the etching of carbonaceous material by N 2 plasma. [42] On the other hand, N bonds to Si, forming species that participate to the thin film growth.…”
Section: Plasma Characterisationmentioning
confidence: 83%
“…The fact that the maxima in the horizontal CN profiles coincide with the annulus of enhanced growth (also found for other values of d [16]) therefore indicates that CN or a closely related species (only one or two reaction steps away) may be important in the diamond growth process in the annulus, regarding both the morphology and the local growth rate. The influence of CN (or a closely related species) on the growth rate may be explained by the possibilities of CN and HCN to abstract adsorbed hydrogen from the growing diamond surface [26,27]. The preferential formation of {100} facets parallel to the substrate in and close to the annulus of enhanced growth may also be related to the presence of CN or a closely related species, because similar morphologies have been observed upon nitrogen addition to flame and other diamond-growing CVD systems [26,[28][29][30][31][32], studies in which also the positive effect of nitrogen addition to the diamondgrowth rate is described.…”
Section: Resultsmentioning
confidence: 99%