2015
DOI: 10.1039/c5sc01941a
|View full text |Cite
|
Sign up to set email alerts
|

Synthesis of high quality two-dimensional materials via chemical vapor deposition

Abstract: The synthesis of high quality two-dimensional materials such as graphene, BN, and transition metal dichalcogenides by CVD provides a new opportunity for large scale applications.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

1
153
0
2

Year Published

2017
2017
2024
2024

Publication Types

Select...
5
3

Relationship

0
8

Authors

Journals

citations
Cited by 233 publications
(156 citation statements)
references
References 90 publications
1
153
0
2
Order By: Relevance
“…Today, the 'scotch tape method' is the most used method [12][13][14][15][16] to prepare monolayers (MLs) of WSe 2 from its bulk counterpart. However, WSe 2 layers have been also fabricated using chemical exfoliation [17][18][19], chemical vapor deposition (CVD) [20][21][22][23][24], metal-organic chemical vapor deposition (MOCVD) [25], hydrothermal exfoliation [26], liquid exfoliation [27][28][29], and physical vapor deposition [30,31]. Due to the existence of these various fabrication techniques, the focus has now shifted to the production of highquality MLs [16,32,33].…”
Section: Introductionmentioning
confidence: 99%
“…Today, the 'scotch tape method' is the most used method [12][13][14][15][16] to prepare monolayers (MLs) of WSe 2 from its bulk counterpart. However, WSe 2 layers have been also fabricated using chemical exfoliation [17][18][19], chemical vapor deposition (CVD) [20][21][22][23][24], metal-organic chemical vapor deposition (MOCVD) [25], hydrothermal exfoliation [26], liquid exfoliation [27][28][29], and physical vapor deposition [30,31]. Due to the existence of these various fabrication techniques, the focus has now shifted to the production of highquality MLs [16,32,33].…”
Section: Introductionmentioning
confidence: 99%
“…The precursors containing carbon or its species (such as hexane) are carrier gases used for graphene synthesis by the CVD method. Although, many substrates are used in this method, Cu foil is easy to find, compatible with process and cheap …”
Section: Introductionmentioning
confidence: 51%
“…Another well‐known example of the bottom‐up approach is the CVD growth of 2D inorganic nanosheets . This method involves the reaction and/or decomposition of vapor phase precursors on preselected substrates at high temperature under inert atmosphere . The structural and physicochemical properties of the CVD‐grown nanosheets can finely be tuned by controlling growth parameters such as precursor, reaction temperature, substrate properties, and atmosphere .…”
Section: Synthesis Of 2d Inorganic Nanosheetsmentioning
confidence: 99%
“…[5] This method involvest he reaction and/or decomposition of vapor phase precursors on preselected substrates at high temperature under inert atmosphere. [70] Thes tructurala nd physicochemical properties of the CVD-grown nanosheets can finely be tuned by controlling growth parameters such as precursor,r eaction temperature, substrate properties,a nd atmosphere. [70] Using this method, 2D inorganic nanosheets with scalable size andq uantity,c ontrollable thickness, high purity and crystallinity,a nd lower defects can be obtained.H owever,t he need of suitable substrate, high temperature, and inert atmosphere impedes its wide scale use for the production of 2D inorganic nanosheets.…”
Section: Bottom-up Approachmentioning
confidence: 99%
See 1 more Smart Citation