Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen

Файнер, Н. И.; Plekhanov, A. G.; Maksimovsky, E. A.; Rumyantsev, Yu. M.

doi:10.1134/s1087659618060056

Glass Phys Chem

2018

DOI: 10.1134/s1087659618060056

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Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen

Н. И. Файнер

A. G. Plekhanov

E. A. Maksimovsky

et al.

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Cited by 6 publications

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et al. 2024

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Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen

Cited by 6 publications

References 21 publications

Effect of deposition rate on anti-reflection and wettability properties of RF magnetron sputtering SiCON thin film

Effect of deposition rate on anti-reflection and wettability properties of RF magnetron sputtering SiCON thin film

Plasma Chemical Synthesis of Amorphous Hydrocarbon Films Alloyed by Silicon, Oxygen and Nitrogen

Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering

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