SYNTHESIS OF MAGNETIC NANOCOMPOSITE  FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL 
DECOMPOSITION OF A GASEOUS MIXTURE 
OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, 
FERROCENE, AND HELIUM

Файнер, Н. И.; Plekhanov, A. G.; Pushkarev, R. V.; Shayapov, V. R.; Maksimovskiy, E. A.; Nadolinny, V. A.; Коротаев, Е. В.; Kaichev, Vasily V.

doi:10.1134/s0022476620120045

Cited by 3 publications

(4 citation statements)

References 24 publications

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“…Therefore, the formation of the Fe 3+ -related paramagnetic centers is possible for SiCNFe ceramics where pyrolysis process was not fully completed. Fainer et al [ 33 ] also observed highly anisotropic EPR signal of paramagnetic centers in SiCNFe films with low Fe concentration annealed at 300–600 °C. They supposed that these centers are [Fe(CN) 6 ] 3− ions.…”

Section: Mössbauer Spectrum Of Sicnfe Ceramics Annealed At 1100 °Cmentioning

confidence: 97%

“…The magnetic hyperfine structure of bcc-Fe may not be observed at room temperature due to superparamagnetic relaxation resulting in the collapse magnetically ordered pattern (sextet) into a single absorption line [43]. The formation of α-Fe nanoparticles in SiCNFe ceramics was reported in numerous publications [23][24][25][26][27][28][29][30][31][32][33]36] and this is expected for SiCNFe annealed at 1100 • C. The EPR spectra of these samples belonging to α-Fe nanoparticles were discussed by Misra et al [28] and splitting of the W-band EPR spectra were observed [29]. Clear evidence of the formation of both α-Fe nanoparticles and large α-Fe clusters was obtained recently by Stepina et al [32] in granulated SiCNFe films with high Fe concentration.…”

Section: Component IVmentioning

confidence: 99%

“…The SiCN/Fe ceramic material was investigated intensively [ 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ] and it was found that the magnetism of this material is a sum of different sources of magnetism: ferromagnetic nanoparticles with different compositions, superparamagnetic Fe 3+ ion clusters and paramagnetic Fe 3+ ions. Hence, one of very important aim to carefully control the chemical composition of SiCNFe ceramics with predictable magnetic properties.…”

Section: Introductionmentioning

confidence: 99%

“…Several investigations of SiCN doped with Fe ions were conducted recently [ 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ]. These studies revealed that magnetic properties of SiCNFe composite are determined by the formation of magnetic nanoparticles, dispersed in diamagnetic SiCN nanoceramics.…”

Section: Introductionmentioning

confidence: 99%

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SiCNFe Ceramics as Soft Magnetic Material for MEMS Magnetic Devices: A Mössbauer Study

et al. 2023

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Polymer-derived SiCNFe ceramics is a prospective material that can be used as soft magnets in MEMS magnetic applications. The optimal synthesis process and low-cost appropriate microfabrication should be developed for best result. Homogeneous and uniform magnetic material is required for developing such MEMS devices. Therefore, the knowledge of exact composition of SiCNFe ceramics is very important for the microfabrication of magnetic MEMS devices. The Mössbauer spectrum of SiCN ceramics, doped with Fe (III) ions, and annealed at 1100 °C, was investigated at room temperature to accurately establish the phase composition of Fe-containing magnetic nanoparticles, which were formed in this material at pyrolysis and which determine their magnetic properties. The analysis of Mössbauer data shows the formation of several Fe-containing magnetic nanoparticles in SiCN/Fe ceramics, such as α-Fe, FexSiyCz, traces of Fe-N and paramagnetic Fe3+ with octahedral oxygen environment. The presence of iron nitride and paramagnetic Fe3+ ions shows that the pyrolysis process was not completed in SiCNFe ceramics annealed at 1100 °C. These new observations confirm the formation of different Fe-containing nanoparticles with complex composition in SiCNFe ceramic composite.

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Section: Mössbauer Spectrum Of Sicnfe Ceramics Annealed At 1100 °Cmentioning

confidence: 97%