Synthesis of ZnO sol–gel thin-films CMOS-Compatible

Abstract

A low-cost sol–gel spin-coating technique is used in this study for the simple synthesis of eco-friendly ZnO multilayer films deposited on (100)-oriented silicon substrates ranging from 150 to 600 nm by adjusting the spin coating rate.

CMOS Compatible Al‐Doped ZnO Sol–Gel Thin‐Film Properties

“…The optical bandgap of the Al-doped ZnO thin films and undoped ZnO sol-gel thin films was calculated using the Tauc relation [56,57] by extrapolating the linear portions of plots (αhν) 2 versus hν using the relation.…”

“…In addition, from XRD spectra, the average crystallite size (D) was determined from the XRD spectra based on the broadening of the peak with the highest intensity corresponding to the (002) diffraction plane using Debye-Scherrer's equation. [56,60] D…”

“…The optical bandgap of the Al‐doped ZnO thin films and undoped ZnO sol–gel thin films was calculated using the Tauc relation [ 56,57 ] by extrapolating the linear portions of plots ( α h ν ) 2 versus h ν using the relation.where α is the absorption coefficient, h ν is the incident photon energy, and A is a constant. The optical bandgap was then calculated by plotting ( α h ν ) 2 versus the photon energy h ν .…”

“…In addition, from XRD spectra, the average crystallite size (D) was determined from the XRD spectra based on the broadening of the peak with the highest intensity corresponding to the (002) diffraction plane using Debye–Scherrer's equation. [ 56,60 ] where k is a constant assumed to be 0.9, λ is the wavelength of X‐Ray used ( λ = 0.154 nm), β is the FWHM of the (002) peak of XRD pattern, and θ is the angle of diffraction peak. These size results were in good agreement with the SEM images.…”

Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering

“…Based on different working principles, it is also widely used in photoelectric sensors [ 21 ], nanogenerators [ 22 ], acceleration sensors [ 23 ], and pressure sensors [ 24 ]. ZnO piezo-layers have been deposited on the substrate by many methods, such as chemical vapor deposition [ 25 ], pulsed laser deposition [ 26 ], sol-gel processing [ 27 ], and magnetron sputtering [ 28 ]. In the structural health monitoring field, a ZnO piezoelectric film sensor monitors pressure and acceleration mainly by piezoelectric characteristics.…”