2007
DOI: 10.5012/bkcs.2007.28.9.1463
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Synthesis of ZrTiO4and Ta2Zr6O17Films by Composition-Combinatorial Approach through Surface Sol-Gel Method and Their Dielectric Properties

Abstract: Single phases of multi-component oxides films, ZrTiO 4 and Ta 2 Zr 6 O 17 , could be synthesized by using the combinatorial approach through surface sol-gel route, coating the appropriate mole ratio of 100 mM zirconium butoxide, tantalum butoxide and titanium butoxide precursors on Pt/Ti/SiO 2 /Si (100) C, and frequency range, 100 Hz to 1 MHz, promising their applications in wide range of temperatures and frequencies. The dielectric constants of the films were lower and a little more dependent on frequency th… Show more

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Cited by 10 publications
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