Synthetic Diamond Micromechanical Membranes, Cantilever Beams, and Bridges

Davidson, J.L.; Ramesham, R.; Ellis, C.

doi:10.1149/1.2086187

Cited by 55 publications

(12 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Adding hydrogen to the UNCD growth process results in a slightly higher Young's modulus, which can also be explained by an increase in crystallite size and the suppression of sp 2 bonding [31][32][33]. At the limit, the Young's modulus increases to over 1200 Gpa for microcrystalline and single crystalline diamond, a value which the best films grown here compare to favourably [34].…”

Section: Mechanical Propertiesmentioning

confidence: 65%

High Young’s modulus in ultra thin nanocrystalline diamond

Williams

Kriele

Hees

et al. 2010

Chemical Physics Letters

103

View full text Add to dashboard Cite

Section: Mechanical Propertiesmentioning

confidence: 65%

High Young’s modulus in ultra thin nanocrystalline diamond

Williams

Kriele

Hees

et al. 2010

Chemical Physics Letters

103

View full text Add to dashboard Cite

“…One of the more obvious methods of obtaining the tribological benefits of diamond while exploiting the availability of Si fabrication technology is to produce Si components to near-net shape and then provide a thin, low wear, low friction diamond coating [22,23]. This approach only works if the diamond film can be produced as a thin, continuous, conformal coating with exceptional low roughness on the Si component.…”

Section: Conformal Diamond Coatingmentioning

confidence: 99%

Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films

Auciello¹,

Birrell²,

Carlisle³

et al. 2004

J. Phys.: Condens. Matter

180

104

View full text Add to dashboard Cite

Most MEMS devices are currently based on silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties which makes it difficult to produce high performance Si based MEMS devices that could work reliably, particularly in harsh environments; diamond, as a superhard material with high mechanical strength, exceptional chemical inertness, outstanding thermal stability and superior tribological performance, could be an ideal material for MEMS. A key challenge for diamond MEMS is the integration of diamond films with other materials. Conventional CVD thin film deposition methods produce diamond films with large grains, high internal stress, poor intergranular adhesion and very rough surfaces, and are consequently ill-suited for MEMS applications. Diamond-like films offer an alternative, but are deposited using physical vapour deposition methods unsuitable for conformal deposition on high aspect ratio features, and generally they do not exhibit the outstanding mechanical properties of diamond. We describe a new ultrananocrystalline diamond (UNCD) film technology based on a microwave plasma technique using argon plasma chemistries that produce UNCD films with morphological and mechanical properties that are ideally suited for producing reliable MEMS devices. We have developed lithographic techniques for the fabrication of UNCD MEMS components, including cantilevers and multilevel devices, acting as precursors to microbearings and gears, making UNCD a promising material for the development of high performance MEMS devices. We also review the mechanical, tribological, electronic transport, chemical and biocompatibility properties of UNCD, which make this an ideal material for reliable, long endurance MEMS device use.

show abstract

“…Several methods such as bulge testing, 1,4-8 nanoindentation, [9][10][11] speed-of-sound measurements, 12 tensile testing of coated fibers, 13 static or dynamic beam deflection, [14][15][16][17][18] and dynamic resonance methods [19][20][21][22][23] have been applied to the determination of the elastic modulus of CVD diamond. All of them are generally limited by geom-etry ͑thin films, fibers͒ and other inherent problems of the measurement method.…”

Section: Introductionmentioning

confidence: 99%

Temperature dependence of Young’s modulus and degradation of chemical vapor deposited diamond

Szuecs

Werner

Sussmann³

et al. 1999

Journal of Applied Physics

View full text Add to dashboard Cite

Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change J. Appl. Phys.Hardness and Young's modulus of high-quality cubic boron nitride films grown by chemical vapor deposition J. Appl. Phys. 93, 1515 (2003); 10.1063/1.1534625Intrinsic stress in chemical vapor deposited diamond films: An analytical model for the plastic deformation of the Si substrate Temperature dependent measurements of Young's modulus were performed for the first time on black and transparent bulk material of chemical vapor deposited ͑CVD͒ diamond by a dynamic three point bending method in a temperature range from Ϫ150 to 850°C. The CVD specimens correspond to a room-temperature Young's modulus of single crystal diamond ͑1143 GPa͒. A lower Young's modulus of polycrystalline diamond is caused by crystal imperfections and impurities. At temperatures between Ϫ150 and 600°C ͑black type͒ or Ϫ150 and 700°C ͑transparent type͒ the Young's modulus is only slightly temperature dependent and decreases monotonically with an average temperature coefficient of Ϫ1.027ϫ10 Ϫ4 K Ϫ1 , which is much higher than theoretically expected. At higher temperatures the bending stiffness and apparent Young's modulus of the diamond beams are drastically reduced to one third of the initial value before fracture occurs due to oxygen etching effects in air. The onset temperature of this degradation phenomenon and the rate of decline are dependent on grain size, texture and the crystal lattice imperfections of the CVD diamond material.

show abstract

Synthetic Diamond Micromechanical Membranes, Cantilever Beams, and Bridges

Cited by 55 publications

References 7 publications

High Young’s modulus in ultra thin nanocrystalline diamond

High Young’s modulus in ultra thin nanocrystalline diamond

Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films

Temperature dependence of Young’s modulus and degradation of chemical vapor deposited diamond

Contact Info

Product

Resources

About