System identification of a novel 6-DOF precision positioning table

Design and control of a 6-degree-of-freedom precision positioning system

“…8, is assembled by two differentkinds of 3-DOF positioning stages, an in-plane stage and an out-of-plane stage. In such a combination system, the references [24] and [27] have proposed, both of them have designed that the in-plane 3-DOF stage located at the bottom of the 6-DOF system has to carry the out-of-plane 3-DOF stage, whichhave much larger masses than the specimen itself.This requiresthe in-plane stage has an excellent carrying capacity and uses much more powerful actuators, which is ineffective in energy consumption during normal operation. However, these design ideas affect the performance of a precision positioning system significantly.…”

“…In this proposed 6-DOF positioning system, the in-plane stage is mounted onthe top of the out-of-plane stage. Both two stages were manufactured monolithically using wire electricaldischarge machining (wire EDM) technology, Al7076 T6 and springsteel 65Mn were adopted as the material of the in-plane and out-of-plane 3-DOF stage, respectively.Compared with the systems in references [24] and [27], the proposed system has the advantages of lighter moving mass,lower power consumption, smaller moving inertia and higher stability, which can ensure faster response speed and high-accuracy positioning. As shown inFig.…”

“…Liang et al [26] presented a 6-DOF parallel mechanism based on three inextensible limbs, whichwere connected to three planar 2-DOF movements in the base plane. A novel 6-DOF precision positioning table was presented in [27], which was assembled by two different 3-DOF precision positioning tables. A novel flexure based 6-DOF parallel positioning system for aligning the precision optical elements was presented by Kang et al [28].…”

A large-range compliant micropositioning stage with remote-center-of-motion characteristic for parallel alignment

“…A number of orientation stages have been developed in the literature, among which the most common one refers to the Z − θ x − θ y stage (Fung and Lin 2009;Lee et al 2013). However, since the rotational center is often located inside the stage, the output platform of such stage suffers excessive lateral movement which is harmful and must be avoided (Qu et al 2014).…”

Modified rate-dependent hysteresis modeling of piezoelectric actuator

“…Among various actuators, piezoelectric ceramic is the most popular in micro/nano positioning technology for its high precision, fast response and high output force [1][2][3][4][5][6][7][8], however, the existence of nonlinear hysteresis greatly decreases its overall accuracy. In last decades, many scholars spared no effort in investigating the hysteresis modeling and they have made significant achievements [9][10][11][12][13][14][15][16], especially Preisach model [11,12], Bouc-Wen model [13,14], Prandtl-Ishlinskii (P-I) model [15,16] have been widely used.…”