2009
DOI: 10.1134/s1063782609130235
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Systematic features of defocused images in scanning electron microscopy and nanoscale size measurements

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Cited by 3 publications
(4 citation statements)
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“…In this study, the effect of habital defocusing is treated based on the notion of the action curve, but all laws remain also valid for the action surface, that is in application to 3D intensity distributions. The action curve I Σ is described by the expression [28]:…”
Section: Methods Of Habit Determination Founded On the Use Of Convergmentioning
confidence: 99%
“…In this study, the effect of habital defocusing is treated based on the notion of the action curve, but all laws remain also valid for the action surface, that is in application to 3D intensity distributions. The action curve I Σ is described by the expression [28]:…”
Section: Methods Of Habit Determination Founded On the Use Of Convergmentioning
confidence: 99%
“…Second, the image is completely determined by the stage of generation of recoil electrons, i.e., by the corpuscular properties of particles, whereas the role of the process based on the wave properties of an electron is reduced only to changes in the sizes of the probe. When the illuminating electron beam scans the surface of a relief object, the probe becomes alternately farther and closer to the focusing plane, and its sizes change, i.e., defocusings arise [20]. As a result, the object affects the parameters of the probe.…”
Section: The Problem Of Size Characterization Of Nano-objectsmentioning
confidence: 99%
“…We consider only the general regularities of habit defocusings and the possibilities of their use for purposes of metrology. The figure describing the habit defocusings is termed the "action surface," and its cross section along a certain direction is called the "action curve" [20]. The action surface and the action curve uniquely reflect the shape of an object and can be used in measuring the object sizes.…”
Section: The Problem Of Size Characterization Of Nano-objectsmentioning
confidence: 99%
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