Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition

Bundesmann, Carsten; Lautenschläger, Thomas; Spemann, D.; Finzel, Annemarie; Thelander, Erik; Mensing, Michael; Frost, Frank

doi:10.1016/j.apsusc.2016.08.056

Cited by 40 publications

(19 citation statements)

References 81 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Before annealing, the density of our film is slightly higher than that of typical sputtered titania films [55] and close to that of the crystalline anatase phase (3.9 g/cm 3 ). The loss increases significantly after the annealing, very likely due to crystallization.…”

Section: Tiosupporting

confidence: 51%

Amorphous optical coatings of present gravitational-wave interferometers

Granata,

Amato,

Balzarini

et al. 2019

Preprint

View full text Add to dashboard Cite

We report on the results of an extensive campaign of optical and mechanical characterization of the ion-beam sputtered oxide layers (Ta 2 O 5 , TiO 2 , Ta 2 O 5 -TiO 2 , SiO 2 ) within the high-reflection coatings of the Advanced LIGO, Advanced Virgo and KAGRA gravitational-wave detectors: refractive index, thickness, optical absorption, composition, density, internal friction and elastic constants have been measured; the impact of deposition rate and post-deposition annealing on coating internal friction has been assessed. For Ta 2 O 5 and SiO 2 layers, coating internal friction increases with the deposition rate, whereas the annealing treatment either erases or largely reduces the gap between samples with different deposition history. For Ta 2 O 5 -TiO 2 layers, the reduction of internal friction due to TiO 2 doping becomes effective only if coupled with annealing. All measured samples showed a weak dependence of internal friction on frequency (φ c (f ) = af b , with −0.208 < b < 0.140 depending on the coating material considered). SiO 2 films showed a mode-dependent loss branching, likely due to spurious losses at the coated edge of the samples. The reference loss values of the Advanced LIGO and Advanced Virgo input (ITM) and end (ETM) mirror HR coatings have been updated by using our estimated value of Young's modulus of Ta 2 O 5 -TiO 2 layers (120 GPa) and are about 10% higher than previous estimations.

show abstract

Section: Tiosupporting

confidence: 51%

Amorphous optical coatings of present gravitational-wave interferometers

Granata,

Amato,

Balzarini

et al. 2019

Preprint

View full text Add to dashboard Cite

show abstract

“…Considering the case of Al 2 O 3 intermediate, i.e., Λ(Al 2 O 3 glass) ≧ Λ(Al 2 O 3 oxide), it is expected that TiO 2 oxide in glasses also would tend Λ(TiO 2 glass) ≧ Λ(TiO 2 oxide). Amorphous TiO 2 thin films and nanoparticles have been synthesized using various fabrication techniques such as the reactive ion beam sputter deposition method, and their structure and properties have received much attention 87–91 . Although the property of amorphous TiO 2 depends on the microstructure and morphology of films and thus on the growth method and conditions, amorphous TiO 2 thin films tend to have the density of d = 3.5–3.8 g/cm 3 and the refractive index of n = 2.30–2.55 at λ = 550 nm 90 .…”

Section: Resultsmentioning

confidence: 99%

“…Amorphous TiO 2 thin films and nanoparticles have been synthesized using various fabrication techniques such as the reactive ion beam sputter deposition method, and their structure and properties have received much attention. [87][88][89][90][91] Although the property of amorphous TiO 2 depends on the microstructure and morphology of films and thus on the growth method and conditions, amorphous TiO 2 thin films tend to have the density of d = 3.5-3.8 g/cm 3 and the refractive index of n = 2.30-2.55 at λ = 550 nm. 90 Bendavid et al 87,88 carried out a systematic study on the structure and optical properties of amorphous TiO 2 thin films synthesized by the filtered arc deposition method and reported the values of d ~ 3.70 /cm 3 8 The crystallization of nano-scale TiO 2 has been carried out in some oxide glasses, 92,93 and the formation of anatase-type TiO 2 nanocrystals has been realized in BaO-TiO 2 -B 2 O 3 glasses.…”

Section: Cao-al 2 O 3 -Sio 2 Glassesmentioning

confidence: 99%

Electronic polarizability in silicate glasses by comparison of experimental and theoretical optical basicities

Komatsu

Dimitrov

Tasheva

et al. 2021

Int J of Appl Glass Sci

View full text Add to dashboard Cite

The concept of optical basicity proposed by Duffy has been recognized as an extremely important issue in science and technology of glasses. In this article, the refractive index (n o )-based optical basicity Λ(n o ) of some binary and ternary silicate glasses was evaluated using the Lorentz-Lorenz formula, and the discrepancy between the values of Λ(n o ) and the theoretically calculated optical basicity Λ th was analyzed to understand more deeply the electronic polarizability in binary and ternary silicate glasses. A suitable value of the optical basicity for each oxide predicting a good quantitative composition dependence of optical basicity in a given glass system was proposed. The suitable value of SiO 2 for the prediction of the optical basicity of silicate glasses is Λ(SiO 2 glass) = 0.53, which is larger than the value of Λ(SiO 2 oxide) = 0.48 being used in the calculation of Λ th so far. Other suitable values such as Λ(Al 2 O 3 glass) = 0.62 and Λ(TiO 2 glass) = 1.04 were proposed. The relationship between the optical basicity and coordination structure in some oxides in silicate glasses was discussed.

show abstract

“…These works cover either the properties of the secondary particles for the Ar and Xe ion bombardment of a Ti target and a TiO 2 target in an oxygen-rich atmosphere 7,8 or the properties of the TiO 2 films deposited under the same conditions. [9][10][11] An important aspect of these studies is the wide range in which the sputtering geometry is varied and the focus on sputtered and backscattered secondary ions.…”

Section: Introductionmentioning

confidence: 99%

Properties of secondary particles for the reactive ion beam sputtering of Ti and TiO2 using oxygen ions

Amelal

Pietzonka

Rohkamm

et al. 2020

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

The ion beam sputtering of a metallic Ti and a ceramic TiO 2 target by bombardment with oxygen ions was investigated systematically. Emphasis was put on the properties of the secondary particles emitted from the target, namely, the angular distribution of the sputtered Ti and the energy distribution of the secondary ions. Ion energies of 0.5, 1.0, and 1.5 keV and incidence angles of 0°, 30°, and 60°were used. The angular distribution of the flux of sputtered Ti particles was determined by measuring the thickness of TiO 2 films that were deposited under emission angles in the range between −40°and +80°. An empirical formula was used to describe the angular distribution as a superposition of an isotropic and an anisotropic cosinelike function. Increasing the ion energy or decreasing the ion incidence angle leads to a more isotropic emission of the sputtered Ti particles. The mass and energy distribution of the secondary ions were measured using an energy-selective mass spectrometer. The most prevalent ion species are O + , O 2 + , Ti + , and TiO +. Ion energy and sputtering geometry, i.e., the combination of an ion incidence angle and an emission angle, were found to have a strong influence on the energy distribution of the secondary ions.

show abstract

Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition

Cited by 40 publications

References 81 publications

Amorphous optical coatings of present gravitational-wave interferometers

Amorphous optical coatings of present gravitational-wave interferometers

Electronic polarizability in silicate glasses by comparison of experimental and theoretical optical basicities

Properties of secondary particles for the reactive ion beam sputtering of Ti and TiO2 using oxygen ions

Contact Info

Product

Resources

About