2005
DOI: 10.1143/jjap.44.l1063
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Ta-doped Anatase TiO2 Epitaxial Film as Transparent Conducting Oxide

Abstract: We present electrical transport and optical properties of Ta-doped TiO2 epitaxial thin films with varying Ta concentration grown by the pulsed laser deposition method. The Ti0.95Ta0.05O2 film exhibited a resistivity of 2.5×10-4 Ω cm at room temperature, and an internal transmittance of 95% in the visible light region. These values are comparable to those of a widely used transparent conducting oxide (TCO), indium tin oxide. Furthermore, this new material falls into a new category of TCOs that utilizes d electr… Show more

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Cited by 160 publications
(132 citation statements)
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“…Tantalum (Ta) was also considered because this metal is stable in harsh electrochemical environments and doping with this metal also improves titania's conductivity. 26,31 Both anatase and rutile phases of titania were studied. Nb-, Ru-, and Ta-doped titania were compared to undoped titania and to each other in the aspects of structure, partial and total density of states (DOS), and free energy of substitution.…”
Section: -12mentioning
confidence: 99%
“…Tantalum (Ta) was also considered because this metal is stable in harsh electrochemical environments and doping with this metal also improves titania's conductivity. 26,31 Both anatase and rutile phases of titania were studied. Nb-, Ru-, and Ta-doped titania were compared to undoped titania and to each other in the aspects of structure, partial and total density of states (DOS), and free energy of substitution.…”
Section: -12mentioning
confidence: 99%
“…All of them have limitations such as uncomfortably narrow ranges of deposition parameters, requirements of high substrate temperatures, cost (for In), etc., and viable alternatives have been sought for many years. A recently discovered alternative is doped TiO 2 [3,4], which is different from the other TCOs in that conduction takes place in the d-band rather than in the s-band [5,6]. Earlier work on TCO-type TiO 2 :Nb has employed pulsed laser deposition [3,[7][8][9][10][11][12][13][14], rf magnetron sputtering [15], and dc magnetron sputtering [11,[16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…TiO 2 -NFs are expected to have many connections to TiO 2 nanoparticles in DSCs without making high potential barrier of carriers at the interface. NTO is well known as TCO with high transparency and conductivity having the same crystal structure of anatase [6,7]. By doping Nb atoms, the Fermi energy of TiO 2 is lowered without any large distortion of crystal lattice.…”
Section: Introductionmentioning
confidence: 99%