2019
DOI: 10.2351/1.5123051
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Tailored focal beam shaping and its application in laser material processing

Abstract: Besides the optimization of the laser and processing parameters, the adaptation of the focal intensity distribution offers great potential for a well-defined control of laser processing and for improving the processing results. In this paper, different tailored intensity distributions were discussed with respect to their suitability for femtosecond laser material processing on the micro- and nanoscale such as cutting, marking, and the generation of laser-induced periodic surface structures. It was shown by mea… Show more

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Cited by 38 publications
(24 citation statements)
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“…The most common approach for shaping focal intensity distributions is based on Fourier optics, where the focusing optics transforms the incoming beam profile into the desired shape. This is well-explained for rotational symmetry in [19,22]. However, for non-rotationally symmetric focal intensity distributions, the symmetry of the beam-shaping element needs to be broken, while the focusing optics remains the same.…”
Section: Focal Beam-shaping and Characterizationmentioning
confidence: 84%
“…The most common approach for shaping focal intensity distributions is based on Fourier optics, where the focusing optics transforms the incoming beam profile into the desired shape. This is well-explained for rotational symmetry in [19,22]. However, for non-rotationally symmetric focal intensity distributions, the symmetry of the beam-shaping element needs to be broken, while the focusing optics remains the same.…”
Section: Focal Beam-shaping and Characterizationmentioning
confidence: 84%
“…The most frequent period in the cross section of the 2D-FFT spectrum is about 2.75 cm −1 , which corresponds to a spatial period of about 362 nm. The homogeneity can be improved by using top-hat beam profiles, but this was not the subject of the current work [ 43 , 44 ]. Nevertheless, the results demonstrate that a thin gold layer enables the reliable and reproducible fabrication of HSFL on large surfaces areas without damaging the fused silica substrate.…”
Section: Resultsmentioning
confidence: 99%
“…This is done with a theoretical approximation given by Eq. (5). Consequently, at this plane instead of p(x, y) one gets the retrieved pupil p ret (x, y) (or p ret (r) in polar coordinates).…”
Section: Numerical Simulations Of Complex Beam Shapingmentioning
confidence: 99%
“…Several efforts to achieve full control over amplitude, phase and polarization of light focused with high numerical aperture objective lenses have been carried out [1][2][3][4]. Furthermore, within the framework of the scalar theory of diffraction some alternative focal beam shaping methods, valid under the paraxial approximation, have also demonstrated their usefulness in many practical applications [5][6][7]. Several types of pure amplitude pupils were used to increase the depth of focus and/or control the distribution of light near the focus.…”
Section: Introductionmentioning
confidence: 99%