2021
DOI: 10.1021/acsaelm.1c00046
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Tailored Hydrogen-Free Carbon Films by Tuning the sp2/sp3 Configuration

Abstract: Carbon configuration is a critical factor in determining the electrical, tribological, and mechanical properties of carbon films. In this work, we synthesized carbon films on a silicate glass by sputtering a graphite target in an Ar atmosphere while varying the DC sputtering power. Using Raman spectroscopy and photoemission analysis, we found that the carbon films produced at low sputtering power consisted mainly of sp3 bonds, while sp2 carbon ordering became dominant as the sputtering power increased. The sp2… Show more

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Cited by 22 publications
(11 citation statements)
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“…In turn, the large transition region hindered the formation of sp 3 hybridized bonds in the DLC film on the γ-Fe substrate. On the other hand, the highest sp 3 fraction in DLC film deposited on the AISI 316L substrate in this study was comparable to that deposited on Si or glass substrates [46,50,51].…”
Section: Discussionsupporting
confidence: 46%
“…In turn, the large transition region hindered the formation of sp 3 hybridized bonds in the DLC film on the γ-Fe substrate. On the other hand, the highest sp 3 fraction in DLC film deposited on the AISI 316L substrate in this study was comparable to that deposited on Si or glass substrates [46,50,51].…”
Section: Discussionsupporting
confidence: 46%
“…For more quantitative analysis, the indentation radius of the tip was calibrated to be 4 nm by correcting the measured E * ( Figure S4 ) on the basis of the well-known modulus of SiO 2 (∼72 GPa). 28 , 29 Finally, E s was extracted from the measured value of E * using eq 5 .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Note that a diamond-coated tip with high stiffness ( E t = 1050 GPa, k = 40 N/m, Micro Star Technologies) was employed to minimize the tip effect. For more quantitative analysis, the indentation radius of the tip was calibrated to be 4 nm by correcting the measured E * (Figure S4) on the basis of the well-known modulus of SiO 2 (∼72 GPa). , Finally, E s was extracted from the measured value of E * using eq .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…A graphitic phase of deposited carbon films reduces the friction coefficient in the vacuum medium [34]. Carbon films having lowered hydrogen content were deposited by tuning the ratio of the graphitic phase to the diamond phase [35].…”
Section: Mohs Hardness Of Carbon Materials Estimated Graphicallymentioning
confidence: 99%