Creating conductive biocompatible coatings with enhanced stability and adhesion can be achieved with cold plasma‐assisted processes, that provide surface modification, and assisted polymerization at mild conditions and room temperature. Here, we report a novel method for the controlled deposition of conductive polymer poly(3,4‐ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) on substrates with different characteristics:, polyethylene terephthalate (PET), poly(dimethylsiloxane) (PDMS), and soda‐lime glass. The plasma deposited PEDOT:PSS films were studied by atomic force microscopy (AFM), scanning electron microscopy (SEM) and Fourier transform infrared (FTIR) spectroscopy, and tested for stability and adhesion. The electrical resistance was obtained by a 4‐point probe station in order to investigate the influence of plasma reaction and etching mechanism on the reproducibility of the electrical parameters. The proposed method was also successfully developed for the deposition of stacked layers structures, with the aim to design basic passive electrical components, such as a resistor or a capacitor. The possibility of realizing complex shapes by selective area deposition can enable the realization of advanced biosensor devices.This article is protected by copyright. All rights reserved.